Автор туралы ақпарат
Statsenko, V.
Шығарылым | Бөлім | Атауы | Файл |
Том 51, № 13 (2017) | Materials for Electronic Engineering | Study of the Structural Properties of Silicon-on-Sapphire Layers in Hydride-Chloride Vapor-Phase Epitaxy | |
Том 53, № 15 (2019) | Technological Processes and Routes | Investigation of the Initial Silicon-on-Sapphire Layer Formed by CVD Techniques |