Study of Structural Modification of Composites with Ge Nanoclusters by Optical and Electron Microscopy Methods


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Composites consisting of Ge nanoclusters embedded in GeO2 matrix were modified by selective removal of the germanium dioxide in deionized water or HF. Thin (up to 200 nm) and thick (300−1500 nm) GeO2{Ge-NCs} heterolayers were studied before and after the etching using Raman spectroscopy, scanning and spectral ellipsometry, scanning electron microscopy. It was found that a stable skeletal framework from agglomerated Ge nanoparticles (amorphous or crystalline) was formed after the etching of thin GeO2{Ge-NCs} heterolayers. When removal the GeO2 matrix from a thick GeO2{Ge-NCs} heterolayer, released Ge nanoclusters were arranged in a vertically ordered chains.

作者简介

K. Astankova

Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences

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Email: as-tankoff@ya.ru
俄罗斯联邦, Novosibirsk, 630090

E. Gorokhov

Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences

Email: latyshev@isp.nsc.ru
俄罗斯联邦, Novosibirsk, 630090

I. Azarov

Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences; Novosibirsk State University

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Email: azarov_ivan@mail.ru
俄罗斯联邦, Novosibirsk, 630090; Novosibirsk, 630090

V. Volodin

Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences; Novosibirsk State University

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Email: volodin@isp.nsc.ru
俄罗斯联邦, Novosibirsk, 630090; Novosibirsk, 630090

A. Latyshev

Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences; Novosibirsk State University

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Email: latyshev@isp.nsc.ru
俄罗斯联邦, Novosibirsk, 630090; Novosibirsk, 630090


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