Electron-diffraction study of graphene-film growth stages during the thermal destruction of 6H-SiC (000\(\bar 1\)) in vacuum
- 作者: Kotousova I.1, Lebedev S.1,2, Lebedev A.1,2
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隶属关系:
- Ioffe Physical–Technical Institute
- National Research University of Information Technologies, Mechanics and Optics
- 期: 卷 50, 编号 7 (2016)
- 页面: 951-956
- 栏目: Carbon Systems
- URL: https://journals.rcsi.science/1063-7826/article/view/197482
- DOI: https://doi.org/10.1134/S1063782616070083
- ID: 197482
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详细
The structure of graphene layers grown by sublimation on a 6H-SiC (000\(\bar 1\)) substrate surface is studied by electron diffraction depending on the sublimation temperature and substrate-surface pretreatment method. It is shown that the use of polishing sublimation etching of the substrate before thermal destruction at a temperature of 1350°C on the substrate surface results in the formation of single-crystal graphene domains with graphene-lattice rotation by 30° with respect to the SiC lattice and a small fraction of amorphous domains. An increase in the temperature to 1500°C leads to the partial formation of a polycrystalline graphene phase with turbostratic structure while retaining the preferred orientation of graphene crystallites as at 1350°C. The use of pregrowth annealing before thermal destruction makes it possible to grow a graphene film with a more ordered and homogeneous structure without inclusions of amorphous and polycrystalline components. The preferred orientation of graphene domains in the film remains unchanged.
作者简介
I. Kotousova
Ioffe Physical–Technical Institute
Email: shura.lebe@mail.ioffe.ru
俄罗斯联邦, ul. Politekhnicheskaya 26, St. Petersburg, 194021
S. Lebedev
Ioffe Physical–Technical Institute; National Research University of Information Technologies, Mechanics and Optics
Email: shura.lebe@mail.ioffe.ru
俄罗斯联邦, ul. Politekhnicheskaya 26, St. Petersburg, 194021; pr. Kronverkskii 49, St. Petersburg, 197101
A. Lebedev
Ioffe Physical–Technical Institute; National Research University of Information Technologies, Mechanics and Optics
编辑信件的主要联系方式.
Email: shura.lebe@mail.ioffe.ru
俄罗斯联邦, ul. Politekhnicheskaya 26, St. Petersburg, 194021; pr. Kronverkskii 49, St. Petersburg, 197101