Two Stages of Surface-Defect Formation in a MOS Structure under Low-Dose Rate Gamma Irradiation


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详细

The results of an experimental study of how surface defects are formed at the Si–SiO2 interface at γ-radiation dose rates of P = 0.1 and 1.0 rad/s are reported. It is found that the surface defects are formed in two stages. The defect-formation mechanisms are analyzed.

作者简介

V. Popov

National Nuclear Research University MEPhI

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Email: wdpopov@mail.ru
俄罗斯联邦, Moscow, 115409


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