Study of the Formation Process of Memristor Structures Based on Copper Sulfide
- Авторы: Belov A.1, Golishnikov A.1, Mastinin A.1, Perevalov A.1, Shevyakov V.1
-
Учреждения:
- National Research University of Electronic Technology “MIET”
- Выпуск: Том 53, № 15 (2019)
- Страницы: 2024-2028
- Раздел: Technological Processes and Routes
- URL: https://journals.rcsi.science/1063-7826/article/view/207569
- DOI: https://doi.org/10.1134/S1063782619150041
- ID: 207569
Цитировать
Аннотация
An alternative to the currently existing elemental basis for creating dynamic random-access memory and flash memory is memristor structures, i.e., two-electrode systems, whose operation is based on the resistance switching effect. In this paper, the results of studying the specific features of the production of memristor structures on the basis of copper sulfide as a promising material providing high-efficiency performance of the structures are reported. The process of copper sulfurization is considered. In this process, the surface region of the copper layer is transformed into sulfide, and the remaining part of the layer is used as the active electrode for the later formed memristor structure. It is shown that, as the concentrations of the initial chemical reagents is increased, the surface roughness of the sulfide layer significantly increases. The sulfide growth rate at optimal initial concentrations of the chemical reagents is ~30 nm/min. In studies of memristor structures, it is established that, as the copper sulfide thickness is increased, the ratio between the resistances in the low- and high-resistance states increases from 11.2 to 12.5. In the memristor structures formed in the study, the time of switching from the high- to low-resistance state is about 1.3 μs, whereas the time of switching from the low- to high-resistance state is 0.9 μs.
Об авторах
A. Belov
National Research University of Electronic Technology “MIET”
Email: Shev@dsd.miee.ru
Россия, Moscow, 124498
A. Golishnikov
National Research University of Electronic Technology “MIET”
Email: Shev@dsd.miee.ru
Россия, Moscow, 124498
A. Mastinin
National Research University of Electronic Technology “MIET”
Email: Shev@dsd.miee.ru
Россия, Moscow, 124498
A. Perevalov
National Research University of Electronic Technology “MIET”
Email: Shev@dsd.miee.ru
Россия, Moscow, 124498
V. Shevyakov
National Research University of Electronic Technology “MIET”
Автор, ответственный за переписку.
Email: Shev@dsd.miee.ru
Россия, Moscow, 124498