Dependence of the Bulk Electrical Properties of Multisilicon on the Grain Misorientation Parameters
- Авторы: Peshcherova S.1, Yakimov E.2, Nepomnyashchikh A.1, Orlov V.2, Feklisova O.2, Pavlova L.1, Presnyakov R.1
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Учреждения:
- Vinogradov Institute of Geochemistry, Siberian Branch, Russian Academy of Sciences
- Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences
- Выпуск: Том 53, № 1 (2019)
- Страницы: 55-59
- Раздел: Microcrystalline, Nanocrystalline, Porous, and Composite Semiconductors
- URL: https://journals.rcsi.science/1063-7826/article/view/205581
- DOI: https://doi.org/10.1134/S1063782619010160
- ID: 205581
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Аннотация
The recombination activity of intragrain defects in multicrystalline silicon is investigated by the electron or laser beam induced current methods. The interrelation of the grain orientation with the character of the distribution of intragrain defects (dislocations and impurity inclusions) and their recombination activity is revealed. The defect grain structure is investigated using various etching procedures to reveal the defects. It is shown that the defect density and distribution in the grains depend on their orientation relative the growth axis. Therefore, it is intragrain defects and impurities that are to a large degree responsible for degradation of the nonequilibrium carrier lifetime when compared with grain boundaries.
Об авторах
S. Peshcherova
Vinogradov Institute of Geochemistry, Siberian Branch, Russian Academy of Sciences
Автор, ответственный за переписку.
Email: spescherova@mail.ru
Россия, Irkutsk, 664033
E. Yakimov
Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences
Email: spescherova@mail.ru
Россия, Chernogolovka, Moscow oblast, 142432
A. Nepomnyashchikh
Vinogradov Institute of Geochemistry, Siberian Branch, Russian Academy of Sciences
Email: spescherova@mail.ru
Россия, Irkutsk, 664033
V. Orlov
Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences
Email: spescherova@mail.ru
Россия, Chernogolovka, Moscow oblast, 142432
O. Feklisova
Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences
Email: spescherova@mail.ru
Россия, Chernogolovka, Moscow oblast, 142432
L. Pavlova
Vinogradov Institute of Geochemistry, Siberian Branch, Russian Academy of Sciences
Email: spescherova@mail.ru
Россия, Irkutsk, 664033
R. Presnyakov
Vinogradov Institute of Geochemistry, Siberian Branch, Russian Academy of Sciences
Email: spescherova@mail.ru
Россия, Irkutsk, 664033