Processing of GaN/Si(111) Epitaxial Structures for MEMS Applications
- Autores: Shubina K.1, Berezovskaya T.1, Mokhov D.1, Morozov I.1, Kotlyar K.1, Mizerov A.1, Nikitina E.1, Bouravleuv A.1
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Afiliações:
- Saint Petersburg National Research Academic University RAS
- Edição: Volume 52, Nº 16 (2018)
- Páginas: 2117-2119
- Seção: 26th INTERNATIONAL SYMPOSIUM “NANOSTRUCTURES: PHYSICS AND TECHNOLOGY”. NANOSTRUCTURE TECHNOLOGY
- URL: https://journals.rcsi.science/1063-7826/article/view/205437
- DOI: https://doi.org/10.1134/S1063782618160297
- ID: 205437
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Resumo
Two different approaches for the etching of the gallium nitride epitaxial layers grown on Si(111) substrates by plasma-assisted molecular beam epitaxy have been elaborated. It is demonstrated that anisotropic etch profiles can be achieved by both photoenhanced wet chemical etching and reactive plasma-chemical etching methods. Moreover, it is shown, that the photoenhanced wet chemical etching allows to remove GaN layer without damaging silicon substrate.
Sobre autores
K. Shubina
Saint Petersburg National Research Academic University RAS
Autor responsável pela correspondência
Email: rein.raus.2010@gmail.com
Rússia, St. Petersburg, 194021
T. Berezovskaya
Saint Petersburg National Research Academic University RAS
Email: rein.raus.2010@gmail.com
Rússia, St. Petersburg, 194021
D. Mokhov
Saint Petersburg National Research Academic University RAS
Email: rein.raus.2010@gmail.com
Rússia, St. Petersburg, 194021
I. Morozov
Saint Petersburg National Research Academic University RAS
Email: rein.raus.2010@gmail.com
Rússia, St. Petersburg, 194021
K. Kotlyar
Saint Petersburg National Research Academic University RAS
Email: rein.raus.2010@gmail.com
Rússia, St. Petersburg, 194021
A. Mizerov
Saint Petersburg National Research Academic University RAS
Email: rein.raus.2010@gmail.com
Rússia, St. Petersburg, 194021
E. Nikitina
Saint Petersburg National Research Academic University RAS
Email: rein.raus.2010@gmail.com
Rússia, St. Petersburg, 194021
A. Bouravleuv
Saint Petersburg National Research Academic University RAS
Email: rein.raus.2010@gmail.com
Rússia, St. Petersburg, 194021