Formation of field-emission emitters by microwave plasma-chemical synthesis of nanocarbon structures
- Autores: Yafarov R.1, Gornev E.2, Orlov S.2, Timoshenkov S.3, Timoshenkov V.3, Timoshenkov A.3
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Afiliações:
- Kotel’nikov Institute of Radio Engineering and Electronics, Saratov Branch
- Molecular Electronics Research Institute
- National Research University Moscow Institute of Electronic Technology (MIET)
- Edição: Volume 50, Nº 13 (2016)
- Páginas: 1726-1728
- Seção: Microelectronic and Nanoelectronic Technology
- URL: https://journals.rcsi.science/1063-7826/article/view/199222
- DOI: https://doi.org/10.1134/S106378261613011X
- ID: 199222
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Resumo
A nanocarbon-emitter technology for integrated field-emission elements has been developed. The modes in which various carbon film structures of diamond, graphite, and graphene-like types are produced were determined. The low-temperature method of obtaining ultradispersed diamonds was examined. It is shown that the high-emission properties of nanodiamond-graphite emitters result from the self-organization of diamond nanocrystals in a graphite film in the course of deposition from ethanol vapor at low pressure with the use of a strongly nonequilibrium microwave plasma. The following parameters of integrated field-emission diodes were obtained: emission threshold of 2.5 V/μm and emission current density of 1.75 A/cm2. The highest current density of more than 20 A/cm2 was obtained in a study of blade-type emitters.
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Sobre autores
R. Yafarov
Kotel’nikov Institute of Radio Engineering and Electronics, Saratov Branch
Email: valeri04@hotmail.com
Rússia, Saratov
E. Gornev
Molecular Electronics Research Institute
Email: valeri04@hotmail.com
Rússia, Moscow
S. Orlov
Molecular Electronics Research Institute
Email: valeri04@hotmail.com
Rússia, Moscow
S. Timoshenkov
National Research University Moscow Institute of Electronic Technology (MIET)
Email: valeri04@hotmail.com
Rússia, Moscow
V. Timoshenkov
National Research University Moscow Institute of Electronic Technology (MIET)
Autor responsável pela correspondência
Email: valeri04@hotmail.com
Rússia, Moscow
A. Timoshenkov
National Research University Moscow Institute of Electronic Technology (MIET)
Email: valeri04@hotmail.com
Rússia, Moscow