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Том 53, № 3 (2019)

Review

Discovery of III–V Semiconductors: Physical Properties and Application

Mikhailova M., Moiseev K., Yakovlev Y.

Аннотация

This overview is devoted to the discovery, development of the technology, and investigation of III–V semiconductors performed at the Ioffe Institute, where the first steps in fabricating III–V semiconductors were taken in 1950 and investigations into their fundamental properties were begun under the leadership of two outstanding scientists—Nina Aleksandrovna Goryunova and Dmitry Nikolayevich Nasledov. Further development of these investigations is reflected in the works of followers and pupils of D.N. Nasledov, who have worked and continue to work at subsidiaries of the Ioffe Institute. The contribution of these investigations to studying heterostructures based on III–V compounds as well as to the development of semiconductor devices for electronics, optoelectronics, and photonics is considered.

Semiconductors. 2019;53(3):273-290
pages 273-290 views

Nonelectronic Properties of Semiconductors (Atomic Structure, Diffusion)

Anharmonicity of Lattice Vibrations in Bi2Se3 Single Crystals

Badalova Z., Abdullayev N., Azhdarov G., Aliguliyeva K., Gahramanov S., Nemov S., Mamedov N.

Аннотация

The temperature dependences of the Raman-active frequencies \(E_{g}^{2}\), \(A_{{1g}}^{2}\) in layered Bi2Se3 single crystals are studied. The contribution of the thermal expansion to a temperature variation in the frequencies is determined. The decay of the anisotropy of the elastic properties in layered Bi2Se3 single crystals due to strong spin–orbit coupling is shown. The Gruneisen-mode parameters for phonons \(E_{g}^{2}\) and \(A_{{1g}}^{2}\) are calculated. Systematic features in the dependences of vibrational frequencies on the atomic masses in layered Bi2Te3, Bi2Se3, and Sb2Te3 single crystals are determined.

Semiconductors. 2019;53(3):291-295
pages 291-295 views

Decomposition of a Solid Solution of Interstitial Magnesium in Silicon

Shuman V., Lodygin A., Portsel L., Yakovleva A., Abrosimov N., Astrov Y.

Аннотация

The decomposition of a solid solution of interstitial magnesium Mgi in silicon is studied. Float-Zone dislocation-free single-crystal n-Si with a resistivity of ~8 × 103 Ω cm and oxygen and carbon contents of ~5 × 1014 cm–3 and ~1 × 1015 cm–3 is used in the experiments. The samples are doped using the diffusion sandwich method at T =1100°C followed by quenching. Decomposition of the supersaturated Mgi solid solution is studied by observing the kinetics of increasing the resistivity of doped samples resulting from their annealing in the range T= 400–620°C. It is found that the decomposition is characterized by an activation energy of Ea ≈ 1.6 eV, which is close to the previously determined diffusion activation energy of Mgi in silicon. It is also shown that Si:Mg exhibits stable properties at temperatures not exceeding 400°C, which is important for its possible practical application.

Semiconductors. 2019;53(3):296-297
pages 296-297 views

Electronic Properties of Semiconductors

Specific Features of the Electron Spin Resonance of an Iron Impurity in HgSe Crystals

Veinger A., Kochman I., Okulov V., Govorkova T., Andriichuk M., Paranchich L.

Аннотация

The electron-spin-resonance spectra of transition metal ions Fe in the HgSe matrix are analyzed. The spectra have an appearance typical of the Fe3+ ion, i.e., they consist of five fine-structure lines with a splitting that corresponds to a weak crystal field. The spectra are observed at temperatures of up to 50 K. The spectral lines are deformed and have a Dyson shape. An analysis of the temperature dependences of the line amplitudes shows that a transition from paramagnetic ordering to ferromagnetic ordering occurs with decreasing temperature, with the Curie temperature T ≈ 7 K.

Semiconductors. 2019;53(3):298-303
pages 298-303 views

Effect of the Copper Content on the Kinetics of the Microwave Photoconductivity of CIGS Solid Solutions

Novikov G., Rabenok E., Orishina P., Gapanovich M., Odin I.

Аннотация

The kinetics of the photoresponse of microwave photoconductivity (9 GHz, TE101-type cavity) on excitation by laser light pulses with a wavelength of 337 nm and a duration of 8 ns in copper-deficient Cu1 –x(In0.7Ga0.3)Se2 (CIGS) (0 < x ≤ 0.4) solid solutions with the chalcopyrite structure is investigated in a wide light intensity range. With an increase in the laser radiation density to ~5 × 1014 photon/cm2 per pulse, the photoresponse acquires, along with the previously revealed skin effect, the effect of the filling of traps created by VCu vacancies and Cu+2 · VCu defect associates, the concentration of which increases with a decrease in x in the CIGS formula.

Semiconductors. 2019;53(3):304-309
pages 304-309 views

Spectroscopy, Interaction with Radiation

Luminescence of (ZnSe:Al):Yb Сrystals at 4.2 K

Makhniy V., Vakhnyak N., Kinzerska O., Pyryatynsky Y.

Аннотация

It is established that the doping of ZnSe:Al crystals with ytterbium from the vapor phase brings about the appearance of two new bands in the low-temperature luminescence spectra. Emission in the energy range 1.15–1.35 eV is defined by transitions in Yb3+ ions, and the edge band is defined by the LO-phonon-assisted transitions of free electrons to acceptor levels of uncontrollable Li impurities.

Semiconductors. 2019;53(3):310-312
pages 310-312 views

Surfaces, Interfaces, and Thin Films

Structure and Properties of Zn-Implanted Si Near-Surface Layer Modification Depending on Irradiation Fluence of 132Xe26+ Ions with Energy of 167 MeV

Privezentsev V., Kulikauskas V., Skuratov V., Zilova O., Burmistrov A., Presnyakov M., Goryachev A.

Аннотация

Single-crystal n-Si(100) wafers are implanted with 64Zn+ ions with an energy of 50 keV and dose of 5 × 1016 cm–2. Then the samples are irradiated with 132Xe26+ ions with an energy of 167 MeV in the range of fluences from 1 × 1012 to 5 × 1014 cm–2. The surface and cross section of the samples are visualized by scanning electron microscopy and transmission electron microscopy. The distribution of implanted Zn atoms is studied by time-of-flight secondary-ion mass spectrometry. After irradiation with Xe, surface pores and clusters consisting of a Zn–ZnO mixture are observed at the sample surface. In the amorphized subsurface Si layer, zinc and zinc-oxide phases are detected. After irradiation with Xe with a fluence of 5 × 1014 cm–2, no zinc or zinc-oxide clusters are detected in the samples by the methods used in the study.

Semiconductors. 2019;53(3):313-320
pages 313-320 views

Mechanism and Features of Field Emission in Semiconductors

Zhukov N., Mikhailov A., Mosiyash D.

Аннотация

The field electron emission from individual grains on the surface of Si and III–V semiconductors, namely, gallium arsenide, indium arsenide, and indium antimonide is investigated by scanning tunneling microscopy. From the correspondence of the functional dependence of the IV characteristic to the theory, the emission mechanism is determined as direct tunneling through a depleted or enriched subsurface layer at the voltages V < 1 V and the tunneling emission from the surface electronic states at the voltages V > 1 V. A field-emission threshold of (1–5) × 106 V/cm is obtained, which is significantly lower than the values for metals and carbon. The determining factors of this emission mechanism are the Schottky effect, the localization and size quantization of “light” electrons in the surface area of III–V semiconductors, and the presence of a subsurface depletion layer in silicon. According to the data obtained for the values of the field-emission threshold, indium antimonide in the form of submicron grain particles is the most efficient field emitter.

Semiconductors. 2019;53(3):321-325
pages 321-325 views

Semiconductor Structures, Low-Dimensional Systems, and Quantum Phenomena

MOS-Hydride Epitaxy Growth of InGaAs/GaAs Submonolayer Quantum Dots for the Excitation of Surface Plasmon–Polaritons

Baidus N., Kukushkin V., Nekorkin S., Kruglov A., Reunov D.

Аннотация

The properties of InGaAs/GaAs quantum dots (QDs) grown by MOS-hydride migration-stimulated epitaxy at a reduced pressure using submonolayer deposition are investigated. The wavelength of their photoluminescence at 300 K is in the range of 1.28–1.31 μm and can be controlled by varying the growth temperature and the number of QD-deposition cycles. The highest QD surface density is 3 × 1010 cm–2. Structures with 1–3 QD layers and spacer layers 5–12 nm thick between them are grown. The spacer layers (as well as the cap layers) are selectively doped with carbon (acceptor). It is established that the QD photoluminescence is characterized by an enhanced degree of polarization in the direction orthogonal to the structure plane. This should favor their use for the excitation of surface plasmon–polaritons in Schottky light-emitting diodes.

Semiconductors. 2019;53(3):326-331
pages 326-331 views

Studying Magnetic Diodes with a GaMnAs Layer Formed by Pulsed Laser Deposition

Zvonkov B., Vikhrova O., Danilov Y., Dorokhin M., Kudrin A., Kalentyeva I., Larionova E., Kovalskiy V., Soltanovich O.

Аннотация

A new design for diode heterostructures with (Ga, Mn)As ferromagnetic layers is experimentally investigated. The diode structures are fabricated using a combination of metal-organic chemical vapor deposition (MOCVD) epitaxy and pulsed laser deposition and contain (Ga, Mn)As/n-InGaAs heterojunctions. The electrical properties of the diodes in a magnetic field applied perpendicular to the pn junction are examined. The negative magnetoresistance observed at temperatures of <50 K (below the (Ga, Mn)As Curie temperature) is attributed to a decrease in the carrier scattering caused by ferromagnetic ordering and in the potential barrier at the (Ga, Mn)As/n-InGaAs interface. The observed negative magnetoresistance depends nonmonotonically on the forward bias with a maximum in the voltage region close to the pn-junction potential barrier height. The maximum can be caused by the decisive contribution of the spin-dependent resistances of the (Ga, Mn)As layer and (Ga, Mn)As/n-InGaAs interface to the total resistance of the structure. It is found that the dependence of the magnetoresistance on the external magnetic field is hysteretic due to the influence of tensile stresses in the (Ga, Mn)As layer grown on top of a relaxed InxGa1 –xAs buffer layer with an indium content of x ≈ 0.1.

Semiconductors. 2019;53(3):332-338
pages 332-338 views

Electron-Quantum Transport in Pseudomorphic and Metamorphic In0.2Ga0.8As-Based Quantum Wells

Vinichenko A., Safonov D., Kargin N., Vasil’evskii I.

Аннотация

Metamorphic high-electron-mobility transistor (HEMT) structures based on deep In0.2Ga0.8As/In0.2Al0.8As quantum wells (0.7 eV for Γ electrons) with different metamorphic buffer designs are implemented and investigated for the first time. The electronic properties of metamorphic and pseudomorphic HEMT structures with the same doping are compared. It is found that, over a temperature range of 4–300 K, both the electron mobility and concentration in the HEMT structure with a linear metamorphic buffer are higher than those in the pseudomorphic HEMT structure due to an increase in the depth of the quantum well. Low-temperature magnetotransport measurements demonstrate that the quantum momentum-relaxation time decreases considerably in metamorphic HEMT structures because of enhanced small-angle scattering resulting from structural defects and inhomogeneities, while the dominant scattering mechanism in structures of both types is still due to remote ionized impurities.

Semiconductors. 2019;53(3):339-344
pages 339-344 views

Spontaneous Emission and Lasing of a Two-Wavelength Quantum-Cascade Laser

Babichev A., Gladyshev A., Kurochkin A., Kolodeznyi E., Nevedomskii V., Karachinsky L., Novikov I., Sofronov A., Egorov A.

Аннотация

The results of experiments on the fabrication (by molecular-beam epitaxy) and investigation of the heterostructures of a two-frequency quantum-cascade laser produced on the basis of a heteropair of In0.53Ga0.47As/Al0.48In0.52As solid solutions on an InP substrate are presented. The heterostructures contained quantum cascades emitting at a wavelength of 9.6 μm and cascades emitting at a wavelength of 7.6 μm. The high structural quality of the fabricated heterostructures is shown. The spontaneous emission and lasing spectra are investigated and the multimodal laser generation of stripe lasers at a wavelength of 7.6 μm is demonstrated.

Semiconductors. 2019;53(3):345-349
pages 345-349 views

Microcrystalline, Nanocrystalline, Porous, and Composite Semiconductors

On the Mechanism of the Vapor–Solid–Solid Growth of Au-Catalyzed GaAs Nanowires

Koryakin A., Kukushkin S., Sibirev N.

Аннотация

The mechanism of the vapor–solid–solid growth of Au-catalyzed GaAs nanowires in the temperature range of 420–450°C is investigated. For the first time, the effect of elastic stresses caused by a difference in the atomic densities of the catalyst and nanowire material on the solid-phase nucleation rate is considered. By assuming that the growth of the GaAs nucleus at the catalyst–nanowire interface is limited  by the As-diffusion flux in the catalyst, it is shown that vapor–solid–solid growth can be implemented through the polycentric-nucleation mode in the temperature range under consideration. The intensity of the nucleation of coherent islands upon vapor–solid–solid growth is shown to be higher than the intensity of nucleation in the case of vapor–liquid–solid growth because a low interphase surface energy is implemented at coherent solid–solid conjugation. It is proved that the nucleation of Au-catalyzed GaAs nanowires by the vapor–solid–solid mechanism is possible only when GaAs-island growth proceeds due to As diffusion along the catalyst–nanowire interface.

Semiconductors. 2019;53(3):350-360
pages 350-360 views

Optical Properties of CdS Nanocrystals Doped with Zinc and Copper

Nitsuk Y., Kiose M., Vaksman Y., Smyntyna V., Yatsunskyi I.

Аннотация

Cadmium-sulfide nanocrystals are produced by the colloidal method. Doping with zinc and copper is conducted during nanocrystal growth. The optical absorption and photoluminescence spectra are studied. The maximum concentration of the optically active copper impurity is determined from a shift of the fundamental absorption edge to lower energies. It is shown that the long-wavelength luminescence of CdS and CdS:Zn nanocrystals is defined by optical transitions at donor–acceptor pairs. In CdS:Cu nanocrystals, optical absorption and photoluminescence in the visible spectral region are defined by recombination transitions involving the ground state of \({\text{Cu}}_{{{\text{Zn}}}}^{{2 + }}\) ions. The infrared absorption and photoluminescence of CdS:Cu quantum dots are defined by intracenter transitions within \({\text{Cu}}_{{{\text{Zn}}}}^{{2 + }}\) ions.

Semiconductors. 2019;53(3):361-367
pages 361-367 views

Physics of Semiconductor Devices

Investigation into the Radiation Hardness of Photodiodes Based on Silicon-on-Sapphire Structures

Kabalnov Y., Trufanov A., Obolensky S.

Аннотация

The electrical properties of photodiodes based on silicon-on-sapphire structures are investigated theoretically and experimentally. It is shown that they are no worse than silicon diodes in terms of their basic parameters, while their radiation hardness is higher by an order of magnitude than that of similar diodes based on bulk silicon.

Semiconductors. 2019;53(3):368-374
pages 368-374 views

EMF Induced in a pn Junction under a Strong Microwave Field and Light

Gulyamov G., Erkaboev U., Sharibaev N., Gulyamov A.

Аннотация

The effect of a strong electromagnetic field on currents and electromotive forces in a pn junction is considered. It is shown that a pn junction upon exposure to an electromagnetic wave becomes a source of electromotive force (emf) dependent on current. An analytical expression for the emf and internal resistance of such a source is derived. Dependences of the electromotive force and internal resistance on diode currents are obtained from the experimental current–voltage characteristic of a pn junction placed into a strong microwave (UHF) electromagnetic field.

Semiconductors. 2019;53(3):375-378
pages 375-378 views

Subnanosecond Avalanche Switching Simulations of n+nn+ Silicon Structures

Podolska N., Rodin P.

Аннотация

The simulations of recently discovered effect of subnanosecond avalanche switching of Si n+nn+-structures have been performed. The electric field in n+nn+-structure is shown to remain quasi-uniform along the current flow direction during the voltage rise stage and it reaches the effective threshold of impact ionization of ~200 kV/cm in the whole n-base. Comparing simulation results with experiments we argue that the field distribution is as well uniform in the transverse direction. Hense, the ultrafast avalanche transient develops quasi-uniformly in the whole n-base volume. The switching time is about ~150 ps. We compare numerical results obtained for various impact ionization models and estimate parameters of the initial voltage pulse that are required for ultrafast avalanche switching of n+nn+-structures.

Semiconductors. 2019;53(3):379-384
pages 379-384 views

Simulation of Transient Processes in 4H-SiC Based Semiconductor Devices (Taking into Account the Incomplete Ionization of Dopants in the ATLAS Module of the SILVACO TCAD Software Package)

Ivanov P., Potapov A., Samsonova T.

Аннотация

Transient process in a resistor–capacitor (RC) circuit with a reverse-biased 4H-SiC pn diode as the capacitive element is simulated. Simulation is performed with the ATLAS software module from the SILVACO TCAD system for technology computer-aided design (TCAD). An alternative way, to that in ATLAS, to set the parameters of doping impurities partly ionized in 4H-SiC at room temperature is suggested. (The INCOMPLETE physical model available in the ATLAS module, which describes the incomplete ionization of doping impurities in semiconductors, is unsuitable for simulating the dynamic characteristics of devices.) The simulation results are discussed in relation to previously obtained experimental results.

Semiconductors. 2019;53(3):385-387
pages 385-387 views

Fabrication, Treatment, and Testing of Materials and Structures

Structure and Properties of Gallium-Oxide Films Produced by High-Frequency Magnetron-Assisted Deposition

Kalygina V., Lygdenova T., Novikov V., Petrova Y., Tsymbalov A., Yaskevich T.

Аннотация

The properties of gallium-oxide films produced by the radio-frequency magnetron-assisted sputtering of a β-Ga2O3 target with deposition onto sapphire substrates are studied. The as-deposited gallium-oxide films are polycrystalline and contain crystallites of the α and β phases. Exposure to oxygen plasma does not bring about the appearance of new crystallites but makes crystallites several times larger in average dimensions in the substrate plane. After annealing at 900°C, the crystallite size becomes twice as large as that in the unannealed film. The films not subjected to thermal annealing exhibit a high resistance at 20°C. In the range of 50–500°C, the conductivity of the samples (G) only slightly depends on temperature (T) and, as T is elevated further, exponentially increases with the activation energy 0.7–1.0 eV. After annealing of the films in argon at 900°C (30 min), the conductivity G starts to sharply increase at T ≈ 350°C. In the dependence of lnG on T  –1, a maximum in the range of 470–520°C and a portion of decreasing conductivity at higher temperatures are observed. The unusual temperature dependence of the conductivity after annealing is attributed to a change in the structure and phase composition of polycrystalline gallium-oxide films and, possibly, to some effects at the surface. The structures produced on insulating substrates are solar blind in the visible wavelength region and sensitive to radiation in the ultraviolet region (222 nm).

Semiconductors. 2019;53(3):388-394
pages 388-394 views

Formation of Nanoporous Copper-Silicide Films

Buchin E., Naumov V., Vasilyev S.

Аннотация

The possibility of forming nanoporous copper-silicide films with different phase compositions is experimentally demonstrated. For this purpose, the parameters of the initial a-Si/Cu structure and the conditions of its annealing are chosen so that the process of solid-phase synthesis comes to a halt at the stage of formation of a branched silicide cluster. Then the films are subjected to liquid etching in a mixture of diluted inorganic acids. In this case, the metastable CuxSi phase with a low Cu content is selectively removed, and a three-dimensional silicide cluster is released. At the same time, surface Kirkendall voids present in the films open. As a result of these two processes in combination, a nanoporous structure is formed.

Semiconductors. 2019;53(3):395-399
pages 395-399 views

Crystallization of Amorphous Germanium Films and Multilayer a-Ge/a-Si Structures upon Exposure to Nanosecond Laser Radiation

Volodin V., Krivyakin G., Ivlev G., Prokopyev S., Gusakova S., Popov A.

Аннотация

The processes of the crystallization of amorphous germanium films and multilayer germanium/silicon structures upon exposure to nanosecond (70 ns) ruby laser radiation (λ = 694 nm) are studied. The samples are grown on silicon and glassy substrates by plasma-enhanced chemical vapor deposition. Pulsed laser annealing of the samples is conducted in the range of pulse energy densities Ep from 0.07 to 0.8 J cm–2. The structure of the films after annealing is determined by analyzing the scanning electron microscopy data and Raman spectra. It is established that, after annealing, the films are completely crystallized and, in this case, contain regions of coarse crystalline grains (>100 nm), whose fraction increases, as Ep is increased, and reaches 40% of the area. From analysis of the position of the Raman peaks, it is conceived that the crystalline grains, whose dimensions exceed 100 nm, either contain structural defects or stretching strains. The correlation length of optical vibrations is determined from the phonon confinement model and found to increase from 5 to 8 nm, as Ep is increased. Pulsed laser annealing of multilayer Ge(10 nm)/Si(5 nm) structures induces partial intermixing of the layers with the formation of Ge–Si alloys.

Semiconductors. 2019;53(3):400-405
pages 400-405 views

Comparative Studies of AlGaAs/InGaAs Enhancement/Depletion-Mode High Electron Mobility Transistors with Virtual Channel Layers by Hybrid Gate Recesses Approaches

Tsai J., Lin P., Chen Y., Liou S., Niu J.

Аннотация

Unlike the conventional GaAs- and InP-based enhancement/depletion-mode (E/D-mode) transistors, the improved gate characteristics of the AlGaAs/InGaAs E-mode high electron mobility transistors (HEMTs) by way of hybrid gate recesses to remove the n-AlAs/i-GaAs/n-AlGaAs virtual channel layers upon 2DEG channels are demonstrated. As compared to the D-mode device (sample A), the gate reverse currents are effectively reduced by 45 and 102 times for the E-mode devices with additional gate recess time of 24 s (sample B) and 30 s (sample C) to remove part of the virtual channel layers, respectively. Under gate forward bias, the hybrid gate recesses also enable the gate turn-on voltages to increase. Furthermore, the threshold voltages of –1.25, 0.09, and 0.22 V are observed in the samples A, B, and C, respectively. The maximum transconductances of 187.3, 209.2, and 243.4 mS/mm and saturation current density of 482.8, 410.6, and 347.4 mA/mm are obtained in the samples A, B, and C, respectively.

Semiconductors. 2019;53(3):406-410
pages 406-410 views

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