Composition and optical properties of amorphous a-SiOx:H films with silicon nanoclusters
- Авторлар: Terekhov V.1, Terukov E.2, Undalov Y.2, Parinova E.1, Spirin D.1, Seredin P.1, Minakov D.1, Domashevskaya E.1
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Мекемелер:
- Voronezh State University
- Ioffe Physical–Technical Institute
- Шығарылым: Том 50, № 2 (2016)
- Беттер: 212-216
- Бөлім: Amorphous, Vitreous, and Organic Semiconductors
- URL: https://journals.rcsi.science/1063-7826/article/view/196781
- DOI: https://doi.org/10.1134/S1063782616020251
- ID: 196781
Дәйексөз келтіру
Аннотация
The phase composition and optical properties of hydrogenated amorphous films of silicon suboxide (a-SiOx:H) with silicon nanoclusters are studied. Ultrasoft X-ray emission spectroscopy show that silicon- suboxide films with various oxidation states and various amorphous silicon-cluster contents can be grown using dc discharge modulation. In films with an ncl-Si content of ∼50%, the optical-absorption edge is observed, whose extrapolation yields an optical band gap estimate of ∼3.2–3.3 eV. In the visible region, rather intense photoluminescence bands are observed, whose peak positions indicate the formation of silicon nanoclusters 2.5–4.7 nm in size in these films, depending on the film composition.
Авторлар туралы
V. Terekhov
Voronezh State University
Хат алмасуға жауапты Автор.
Email: ftt@phys.vsu.ru
Ресей, Universitetskaya pl. 1, Voronezh, 394006
E. Terukov
Ioffe Physical–Technical Institute
Email: ftt@phys.vsu.ru
Ресей, ul. Politekhnicheskaya 26, St. Petersburg, 194021
Yu. Undalov
Ioffe Physical–Technical Institute
Email: ftt@phys.vsu.ru
Ресей, ul. Politekhnicheskaya 26, St. Petersburg, 194021
E. Parinova
Voronezh State University
Email: ftt@phys.vsu.ru
Ресей, Universitetskaya pl. 1, Voronezh, 394006
D. Spirin
Voronezh State University
Email: ftt@phys.vsu.ru
Ресей, Universitetskaya pl. 1, Voronezh, 394006
P. Seredin
Voronezh State University
Email: ftt@phys.vsu.ru
Ресей, Universitetskaya pl. 1, Voronezh, 394006
D. Minakov
Voronezh State University
Email: ftt@phys.vsu.ru
Ресей, Universitetskaya pl. 1, Voronezh, 394006
E. Domashevskaya
Voronezh State University
Email: ftt@phys.vsu.ru
Ресей, Universitetskaya pl. 1, Voronezh, 394006