Microstructural Evolution of MOVPE Grown GaN by the Carrier Gas
- Authors: Demir I.1, Altuntas I.1, Kasapoğlu A.E.2, Mobtakeri S.2, Gür E.2,3, Elagoz S.1
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Affiliations:
- Department of Nanotechnology Engineering, Nanophotonics Research and Application Center Cumhuriyet University
- East Anatolia High Technology Application and Research Center, Atatürk University
- Department of Physics, Faculty of Science, Ataturk University
- Issue: Vol 52, No 16 (2018)
- Pages: 2030-2038
- Section: Surfaces, Interfaces, and Thin Films
- URL: https://journals.rcsi.science/1063-7826/article/view/205288
- DOI: https://doi.org/10.1134/S1063782618160066
- ID: 205288
Cite item
Abstract
We report the effect of total carrier gas flow of GaN during both GaN nucleation layer and high temperature GaN growth steps on structural, optical, electrical and morphological properties. The formation of dislocations in GaN layer and their effects were investigated in detail as a function of carrier gas flow. It has been found that the more carrier gas requires longer recovery time for transition from 3D (3 dimensional) to 2D growth and results in smaller edge-type dislocation density. The images obtained from the AFM measurements have shown terraces widths varying between 60–150 nm depending on the hydrogen flow rate.
About the authors
I. Demir
Department of Nanotechnology Engineering, Nanophotonics Research and Application Center Cumhuriyet University
Email: elagoz@cumhuriyet.edu.tr
Turkey, Sivas, 58140
I. Altuntas
Department of Nanotechnology Engineering, Nanophotonics Research and Application Center Cumhuriyet University
Email: elagoz@cumhuriyet.edu.tr
Turkey, Sivas, 58140
A. E. Kasapoğlu
East Anatolia High Technology Application and Research Center, Atatürk University
Email: elagoz@cumhuriyet.edu.tr
Turkey, Erzurum, 25240
S. Mobtakeri
East Anatolia High Technology Application and Research Center, Atatürk University
Email: elagoz@cumhuriyet.edu.tr
Turkey, Erzurum, 25240
E. Gür
East Anatolia High Technology Application and Research Center, Atatürk University; Department of Physics, Faculty of Science, Ataturk University
Email: elagoz@cumhuriyet.edu.tr
Turkey, Erzurum, 25240; Erzurum, 25250
S. Elagoz
Department of Nanotechnology Engineering, Nanophotonics Research and Application Center Cumhuriyet University
Author for correspondence.
Email: elagoz@cumhuriyet.edu.tr
Turkey, Sivas, 58140