Formation of donors in germanium–silicon alloys implanted with hydrogen ions with different energies
- Authors: Pokotilo Y.M.1, Petukh A.N.1, Litvinov V.V.1, Markevich V.P.2, Abrosimov N.V.3, Kamyshan A.S.4, Giro A.V.1, Solyanikova K.A.1
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Affiliations:
- Belarusian State University
- University of Manchester
- Leibnitz Institute of Crystal Growth
- Sevchenko Institute of Applied Physical Problems
- Issue: Vol 50, No 8 (2016)
- Pages: 1122-1124
- Section: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/197758
- DOI: https://doi.org/10.1134/S1063782616080182
- ID: 197758
Cite item
Abstract
The distributions of hydrogen-containing donors in Ge1–xSix (0 ≤ x ≤ 0.06) alloys implanted with hydrogen ions with an energy of 200 and 300 keV and a dose of 1 × 1015 cm–2 are studied. It is established that, at the higher ion energy, the limiting donor concentration after postimplantation heat treatment (275°C) is attained within ~30 min and, at the lower energy, within ~320 min. In contrast to donors formed near the surface, a portion of hydrogen-containing donors formed upon the implantation of ions with the higher energy possess the property of bistability. The limiting donor concentration is independent of the ion energy, but decreases from 1.3 × 1016 to 1.5 × 1015 cm–3, as the Si impurity content in the alloy is increased from x = 0.008 to x = 0.062. It is inferred that the observed differences arise from the participation of the surface in the donor formation process, since the surface significantly influences defect-formation processes involving radiation-induced defects, whose generation accompanies implantation.
About the authors
Yu. M. Pokotilo
Belarusian State University
Author for correspondence.
Email: Pokotilo@bsu.by
Belarus, Minsk, 220050
A. N. Petukh
Belarusian State University
Email: Pokotilo@bsu.by
Belarus, Minsk, 220050
V. V. Litvinov
Belarusian State University
Email: Pokotilo@bsu.by
Belarus, Minsk, 220050
V. P. Markevich
University of Manchester
Email: Pokotilo@bsu.by
United Kingdom, Manchester, M13 9PL
N. V. Abrosimov
Leibnitz Institute of Crystal Growth
Email: Pokotilo@bsu.by
Germany, Berlin, D-12489
A. S. Kamyshan
Sevchenko Institute of Applied Physical Problems
Email: Pokotilo@bsu.by
Belarus, Minsk, 220108
A. V. Giro
Belarusian State University
Email: Pokotilo@bsu.by
Belarus, Minsk, 220050
K. A. Solyanikova
Belarusian State University
Email: Pokotilo@bsu.by
Belarus, Minsk, 220050