Author Details
Sharafutdinov, R. G.
| Issue | Section | Title | File |
| Vol 53, No 1 (2019) | Fabrication, Treatment, and Testing of Materials and Structures | Deposition of Silicon Films Doped with Boron and Phosphorus by the Gas-Jet Plasma-Chemical Method | |
| Vol 53, No 12 (2019) | Fabrication, Treatment, and Testing of Materials and Structures | Deposition of Amorphous and Microcrystalline Films of Silicon by the Gas-Jet Plasma-Chemical Method |