作者的详细信息

Sharafutdinov, R. G.

栏目 标题 文件
卷 53, 编号 1 (2019) Fabrication, Treatment, and Testing of Materials and Structures Deposition of Silicon Films Doped with Boron and Phosphorus by the Gas-Jet Plasma-Chemical Method
卷 53, 编号 12 (2019) Fabrication, Treatment, and Testing of Materials and Structures Deposition of Amorphous and Microcrystalline Films of Silicon by the Gas-Jet Plasma-Chemical Method
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