Email this article XAFS Investigation of Nanoparticle Formation in 64Zn+ Ion Implanted and Thermo Oxidized Quartz
- Authors: Khramov E.V.1, Privezentsev V.V.2,3, Palagushkin A.N.3
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Affiliations:
- National Research Center “Kurchatov Institute”
- Valiev Institute of Physics and Technology, Russian Academy of Sciences
- National Research Center “Scientific Research Institute of System Analysis, Russian Academy of Sciences”
- Issue: Vol 53, No 16 (2019)
- Pages: 2115-2117
- Section: Nanostructures Technology
- URL: https://journals.rcsi.science/1063-7826/article/view/207607
- DOI: https://doi.org/10.1134/S1063782619120145
- ID: 207607
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Abstract
The silica glass substrates were implanted by 64Zn+ ions with dose of 5 × 1016 cm−2 and energy of 50 keV. During implantation the ion beam current density was less than 0.5 μA/cm2 to avoid the substrate magnetically heating. After implantation, the substrates were subjected to isochronous for 1h heat treatment in oxygen atmosphere at temperature range from 400 up to 1000oC with a step of 100oC. Zn K-edge EXAFS spectra were measured in fluorescent mode. According to Zn K-edge EXAFS data, Zn in as implanted state and after oxidation at 800oC is fully oxidized and surrounded by O atoms with coordination number of 4. However, in as implanted state there were disordered orientation of Zn atoms, and ordered tetrahedral coordination occurs only after heat treatment at 800oC.
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About the authors
E. V. Khramov
National Research Center “Kurchatov Institute”
Email: v.privezentsev@mail.ru
Russian Federation, Moscow, 123182
V. V. Privezentsev
Valiev Institute of Physics and Technology, Russian Academy of Sciences; National Research Center “Scientific Research Institute of System Analysis, Russian Academy of Sciences”
Author for correspondence.
Email: v.privezentsev@mail.ru
Russian Federation, Moscow, 117218; Moscow, 117218
A. N. Palagushkin
National Research Center “Scientific Research Institute of System Analysis, Russian Academy of Sciences”
Email: v.privezentsev@mail.ru
Russian Federation, Moscow, 117218
