Lithography and Plasma Treatment Effect on Conductivity of Carbon Nanotubes
- Авторлар: Mitin D.1,2, Raudik S.1, Mozharov A.3, Bolshakov A.1, Fedorov V.1, Nepokh V.1, Rajanna P.4, Nasibulin A.4, Mukhin I.1,3
-
Мекемелер:
- Saint Petersburg Academic University
- Ioffe Institute
- ITMO University
- Skolkovo Institute of Science and Technology
- Шығарылым: Том 53, № 14 (2019)
- Беттер: 1926-1928
- Бөлім: Nanostructures Characterization
- URL: https://journals.rcsi.science/1063-7826/article/view/207523
- DOI: https://doi.org/10.1134/S1063782619140148
- ID: 207523
Дәйексөз келтіру
Аннотация
Transparency and sheet resistance measurements of transferred CNT film on glass substrate were performed. Effect of optical lithography and plasma treatment processes on CNT film sheet resistance was analyzed. CNT film demonstrates good electrical conductivity and chemical stability to post-growth processing techniques. The maximum increase in the sheet resistance of the CNT film after optical lithography and plasma treatment processes is no more than 7%.
Негізгі сөздер
Авторлар туралы
D. Mitin
Saint Petersburg Academic University; Ioffe Institute
Хат алмасуға жауапты Автор.
Email: mitindm@mail.ru
Ресей, St. Petersburg, 194021; St. Petersburg, 194021
S. Raudik
Saint Petersburg Academic University
Хат алмасуға жауапты Автор.
Email: s.raudik@gmail.com
Ресей, St. Petersburg, 194021
A. Mozharov
ITMO University
Хат алмасуға жауапты Автор.
Email: mozharov@spbau.ru
Ресей, St. Petersburg, 197101
A. Bolshakov
Saint Petersburg Academic University
Хат алмасуға жауапты Автор.
Email: acr1235@mail.ru
Ресей, St. Petersburg, 194021
V. Fedorov
Saint Petersburg Academic University
Хат алмасуға жауапты Автор.
Email: vfedorov.fl@mail.ioffe.ru
Ресей, St. Petersburg, 194021
V. Nepokh
Saint Petersburg Academic University
Хат алмасуға жауапты Автор.
Email: vneplox@gmail.com
Ресей, St. Petersburg, 194021
P. Rajanna
Skolkovo Institute of Science and Technology
Хат алмасуға жауапты Автор.
Email: pramod.rajanna@skolkovotech.ru
Ресей, Moscow, 121205
A. Nasibulin
Skolkovo Institute of Science and Technology
Хат алмасуға жауапты Автор.
Email: a.nasibulin@skoltech.ru
Ресей, Moscow, 121205
I. Mukhin
Saint Petersburg Academic University; ITMO University
Хат алмасуға жауапты Автор.
Email: imukhin@yandex.ru
Ресей, St. Petersburg, 194021; St. Petersburg, 197101