Plasma-Chemical Deposition of Diamond-Like Films onto the Surface of Heavily Doped Single-Crystal Diamond
- Authors: Korolyov S.A.1, Kraev S.A.1, Arkhipova E.A.1, Skorokhodov E.V.1, Bushuykin P.A.1, Shashkin V.I.1, Okhapkin A.I.1, Yunin P.A.1, Drozdov M.N.1
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Affiliations:
- Institute for Physics of Microstructures, Russian Academy of Sciences
- Issue: Vol 53, No 9 (2019)
- Pages: 1203-1206
- Section: Xxiii International Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, March 11–14, 2019
- URL: https://journals.rcsi.science/1063-7826/article/view/206781
- DOI: https://doi.org/10.1134/S1063782619090136
- ID: 206781
Cite item
Abstract
The plasma-chemical deposition of diamond-like carbon (DLC) films onto heavily boron-doped single-crystal p-type diamond (the concentration ~1020 cm–3) in CH4 + Ar plasma is conducted. The deposition rate is 7 nm min–1. The elemental composition and properties of the films are studied in detail. It is found that the films are enriched with hydrogen, possess a density of 2.4 g cm–3, and exhibit an ultrasmooth surface (with a roughness of 0.4 ± 0.2 nm).
About the authors
S. A. Korolyov
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: andy-ohapkin@yandex.ru
Russian Federation, Afonino, Nizhny Novgorod region, 603087
S. A. Kraev
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: andy-ohapkin@yandex.ru
Russian Federation, Afonino, Nizhny Novgorod region, 603087
E. A. Arkhipova
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: andy-ohapkin@yandex.ru
Russian Federation, Afonino, Nizhny Novgorod region, 603087
E. V. Skorokhodov
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: andy-ohapkin@yandex.ru
Russian Federation, Afonino, Nizhny Novgorod region, 603087
P. A. Bushuykin
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: andy-ohapkin@yandex.ru
Russian Federation, Afonino, Nizhny Novgorod region, 603087
V. I. Shashkin
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: andy-ohapkin@yandex.ru
Russian Federation, Afonino, Nizhny Novgorod region, 603087
A. I. Okhapkin
Institute for Physics of Microstructures, Russian Academy of Sciences
Author for correspondence.
Email: andy-ohapkin@yandex.ru
Russian Federation, Afonino, Nizhny Novgorod region, 603087
P. A. Yunin
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: andy-ohapkin@yandex.ru
Russian Federation, Afonino, Nizhny Novgorod region, 603087
M. N. Drozdov
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: andy-ohapkin@yandex.ru
Russian Federation, Afonino, Nizhny Novgorod region, 603087