Microlens-Enhanced Substrate Patterning and MBE Growth of GaP Nanowires
- Authors: Bolshakov A.D.1, Cirlin G.E.1,2,3, Mukhin M.S.2, Shkoldin V.A.1, Shugurov K.Y.1, Mozharov A.M.1, Sapunov G.A.1, Fedorov V.V.1, Dvoretckaia L.N.1, Mukhin I.S.1,2
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Affiliations:
- St. Petersburg Academic University
- ITMO University
- Ioffe Institute
- Issue: Vol 52, No 16 (2018)
- Pages: 2088-2091
- Section: 26th INTERNATIONAL SYMPOSIUM “NANOSTRUCTURES: PHYSICS AND TECHNOLOGY”. NANOSTRUCTURE TECHNOLOGY
- URL: https://journals.rcsi.science/1063-7826/article/view/205380
- DOI: https://doi.org/10.1134/S1063782618160054
- ID: 205380
Cite item
Abstract
In this paper we demonstrate the results on selective area growth of GaP nanowires via self-catalyzed growth method using molecular beam epitaxy (MBE) technique on patterned Si(111) substrates. The pattern fabrication method on a base of the photolithography process over an array of microspherical lenses has been studied theoretically and then optimized in order to obtain the nanostructures with controlled morphology. It was found that the positive resist thickness corresponding to the best achievable resolution in the subwavelength region is 250 nm in case of 1.5 μm silica spheres and excitation with 365 nm LED. The silica growth mask for selective epitaxy was fabricated. The ordered array of GaP nanowires was synthesized with MBE. Large scale ordering and selectivity of the growth technique is demonstrated.
About the authors
A. D. Bolshakov
St. Petersburg Academic University
Author for correspondence.
Email: bolshakov@live.com
Russian Federation, St. Petersburg, 194021
G. E. Cirlin
St. Petersburg Academic University; ITMO University; Ioffe Institute
Email: bolshakov@live.com
Russian Federation, St. Petersburg, 194021; St. Petersburg, 197101; St. Petersburg, 194021
M. S. Mukhin
ITMO University
Email: bolshakov@live.com
Russian Federation, St. Petersburg, 197101
V. A. Shkoldin
St. Petersburg Academic University
Email: bolshakov@live.com
Russian Federation, St. Petersburg, 194021
K. Yu. Shugurov
St. Petersburg Academic University
Email: bolshakov@live.com
Russian Federation, St. Petersburg, 194021
A. M. Mozharov
St. Petersburg Academic University
Email: bolshakov@live.com
Russian Federation, St. Petersburg, 194021
G. A. Sapunov
St. Petersburg Academic University
Email: bolshakov@live.com
Russian Federation, St. Petersburg, 194021
V. V. Fedorov
St. Petersburg Academic University
Email: bolshakov@live.com
Russian Federation, St. Petersburg, 194021
L. N. Dvoretckaia
St. Petersburg Academic University
Email: bolshakov@live.com
Russian Federation, St. Petersburg, 194021
I. S. Mukhin
St. Petersburg Academic University; ITMO University
Email: bolshakov@live.com
Russian Federation, St. Petersburg, 194021; St. Petersburg, 197101