Air-Oxidation of Nb Nano-Films
- Authors: Lubenchenko A.V.1, Batrakov A.A.1, Ivanov D.A.1, Lubenchenko O.I.1, Lashkov I.A.1, Pavolotsky A.B.2, Schleicher B.3, Albert N.3, Nielsch K.3
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Affiliations:
- National Research University MPEI
- Chalmers University of Technology
- IFW Dresden, Institute for Metallic Materials
- Issue: Vol 52, No 5 (2018)
- Pages: 678-682
- Section: XXV International Symposium “Nanostructures: Physics and Technology”, Saint Petersburg, Russia, June 26–30, 2017. Nanostructure Technology
- URL: https://journals.rcsi.science/1063-7826/article/view/203412
- DOI: https://doi.org/10.1134/S1063782618050196
- ID: 203412
Cite item
Abstract
X-ray photoelectron spectroscopy (XPS) depth chemical and phase profiling of air-oxidized niobium nanofilms has been performed. It is found that oxide layer thicknesses depend on the initial thickness of the niobium nanofilm. The increase in thickness of the initial Nb nano-layer is due to increase in thickness of an oxidized layer.
About the authors
A. V. Lubenchenko
National Research University MPEI
Author for correspondence.
Email: LubenchenkoAV@mpei.ru
Russian Federation, Moscow, 111250
A. A. Batrakov
National Research University MPEI
Email: LubenchenkoAV@mpei.ru
Russian Federation, Moscow, 111250
D. A. Ivanov
National Research University MPEI
Email: LubenchenkoAV@mpei.ru
Russian Federation, Moscow, 111250
O. I. Lubenchenko
National Research University MPEI
Email: LubenchenkoAV@mpei.ru
Russian Federation, Moscow, 111250
I. A. Lashkov
National Research University MPEI
Email: LubenchenkoAV@mpei.ru
Russian Federation, Moscow, 111250
A. B. Pavolotsky
Chalmers University of Technology
Email: LubenchenkoAV@mpei.ru
Sweden, Goteborg, 41296
B. Schleicher
IFW Dresden, Institute for Metallic Materials
Email: LubenchenkoAV@mpei.ru
Germany, Dresden, 01069
N. Albert
IFW Dresden, Institute for Metallic Materials
Email: LubenchenkoAV@mpei.ru
Germany, Dresden, 01069
K. Nielsch
IFW Dresden, Institute for Metallic Materials
Email: LubenchenkoAV@mpei.ru
Germany, Dresden, 01069