Surface Nanostructures Forming during the Early Stages of the Metal-Assisted Chemical Etching of Silicon. Optical Properties of Silver Nanoparticles
- Authors: Zharova Y.A.1, Tolmachev V.A.1, Bednaya A.I.1, Pavlov S.I.1
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Affiliations:
- Ioffe Institute
- Issue: Vol 52, No 3 (2018)
- Pages: 316-319
- Section: Surfaces, Interfaces, and Thin Films
- URL: https://journals.rcsi.science/1063-7826/article/view/202572
- DOI: https://doi.org/10.1134/S1063782618030235
- ID: 202572
Cite item
Abstract
In this two-part work, nanostructures formed in a three-step process of metal-assisted chemical etching of silicon are investigated. In the first part (present publication), the process of the chemical deposition of a layer of self-assembled silver nanoparticles on the surface of a silicon wafer (the first stage of metalassisted chemical etching) is studied. This layer, on the one hand, serves as a catalyst for the subsequent etching of silicon, and, on the other hand, represents a kind of mask for the formation of a certain topology of the emerging Si nanowires. The morphology of the obtained 40- to 60-nm-thick silver nanoparticle layers is investigated by scanning electron microscopy. The spectral dependences of the ellipsometric angles Ψ and Δ are measured using spectroscopic ellipsometry (λ = 250–900nm), and the complex dielectric function of the silver nanolayers is determined from these spectra. The dielectric function features a characteristic plasmon resonance peak in the ultraviolet spectral range. The study of the optical properties of Si nanofilament layers which form during the early stages of metal-assisted chemical etching will be reported as the second part of this work in a separate publication.
About the authors
Yu. A. Zharova
Ioffe Institute
Author for correspondence.
Email: piliouguina@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
V. A. Tolmachev
Ioffe Institute
Email: piliouguina@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
A. I. Bednaya
Ioffe Institute
Email: piliouguina@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
S. I. Pavlov
Ioffe Institute
Email: piliouguina@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021