Investigation of the Modified Structure of a Quantum Cascade Laser
- Authors: Mamutin V.V.1, Maleev N.A.1, Vasilyev A.P.1, Ilyinskaya N.D.1, Zadiranov Y.M.1, Usikova A.A.1, Yagovkina M.A.1, Shernyakov Y.M.1, Ustinov V.M.1
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Affiliations:
- Ioffe Institute
- Issue: Vol 52, No 1 (2018)
- Pages: 126-130
- Section: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/202328
- DOI: https://doi.org/10.1134/S106378261801013X
- ID: 202328
Cite item
Abstract
The process of obtaining a modified structure for quantum cascade lasers is studied; this process includes growth using molecular-beam epitaxy, plasma etching, photolithography with the use of liquid etching, and the formation of special contacts for decreasing losses in the waveguide. The use of a special type of structure makes it possible, even without postgrowth overgrowth with a high-resistivity material, to attain parameters satisfying requirements to heterostructures in high-quality quantum cascade lasers at maximal simplification of the entire preparation process.
About the authors
V. V. Mamutin
Ioffe Institute
Author for correspondence.
Email: mamutin@mail.ru
Russian Federation, St. Petersburg, 194021
N. A. Maleev
Ioffe Institute
Email: mamutin@mail.ru
Russian Federation, St. Petersburg, 194021
A. P. Vasilyev
Ioffe Institute
Email: mamutin@mail.ru
Russian Federation, St. Petersburg, 194021
N. D. Ilyinskaya
Ioffe Institute
Email: mamutin@mail.ru
Russian Federation, St. Petersburg, 194021
Yu. M. Zadiranov
Ioffe Institute
Email: mamutin@mail.ru
Russian Federation, St. Petersburg, 194021
A. A. Usikova
Ioffe Institute
Email: mamutin@mail.ru
Russian Federation, St. Petersburg, 194021
M. A. Yagovkina
Ioffe Institute
Email: mamutin@mail.ru
Russian Federation, St. Petersburg, 194021
Yu. M. Shernyakov
Ioffe Institute
Email: mamutin@mail.ru
Russian Federation, St. Petersburg, 194021
V. M. Ustinov
Ioffe Institute
Email: mamutin@mail.ru
Russian Federation, St. Petersburg, 194021