Formation of silicon nanocrystals in multilayer nanoperiodic a-SiOx/insulator structures from the results of synchrotron investigations
- Authors: Turishchev S.Y.1, Terekhov V.A.1, Koyuda D.A.1, Ershov A.V.2, Mashin A.I.2, Parinova E.V.1, Nesterov D.N.1, Grachev D.A.2, Karabanova I.A.2, Domashevskaya E.P.1
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Affiliations:
- Voronezh State University
- Lobachevsky State University of Nizhny Novgorod
- Issue: Vol 51, No 3 (2017)
- Pages: 349-352
- Section: Semiconductor Structures, Low-Dimensional Systems, and Quantum Phenomena
- URL: https://journals.rcsi.science/1063-7826/article/view/199598
- DOI: https://doi.org/10.1134/S1063782617030241
- ID: 199598
Cite item
Abstract
The problem of the efficiency of the controllable formation of arrays of silicon nanoparticles is studied on the basis of detailed investigations of the electronic structure of multilayer nanoperiodic a-SiOx/SiO2, a-SiOx/Аl2О3, and a-SiOx/ZrO2 compounds. Using synchrotron radiation and the X-ray absorption near edge structure (XANES) spectroscopy technique, a modification is revealed for the investigated structures under the effect of high-temperature annealing at the highest temperature of 1100°C; this modification is attributed to the formation of silicon nanocrystals in the layers of photoluminescent multilayer structures.
About the authors
S. Yu. Turishchev
Voronezh State University
Author for correspondence.
Email: tsu@phys.vsu.ru
Russian Federation, Voronezh, 394018
V. A. Terekhov
Voronezh State University
Email: tsu@phys.vsu.ru
Russian Federation, Voronezh, 394018
D. A. Koyuda
Voronezh State University
Email: tsu@phys.vsu.ru
Russian Federation, Voronezh, 394018
A. V. Ershov
Lobachevsky State University of Nizhny Novgorod
Email: tsu@phys.vsu.ru
Russian Federation, Nizhny Novgorod, 603950
A. I. Mashin
Lobachevsky State University of Nizhny Novgorod
Email: tsu@phys.vsu.ru
Russian Federation, Nizhny Novgorod, 603950
E. V. Parinova
Voronezh State University
Email: tsu@phys.vsu.ru
Russian Federation, Voronezh, 394018
D. N. Nesterov
Voronezh State University
Email: tsu@phys.vsu.ru
Russian Federation, Voronezh, 394018
D. A. Grachev
Lobachevsky State University of Nizhny Novgorod
Email: tsu@phys.vsu.ru
Russian Federation, Nizhny Novgorod, 603950
I. A. Karabanova
Lobachevsky State University of Nizhny Novgorod
Email: tsu@phys.vsu.ru
Russian Federation, Nizhny Novgorod, 603950
E. P. Domashevskaya
Voronezh State University
Email: tsu@phys.vsu.ru
Russian Federation, Voronezh, 394018