Technique for forming ITO films with a controlled refractive index
- Authors: Kukushkin M.V.1,2, Zakheim D.A.1, Pavlov S.I.1, Markov L.K.1, Smirnova I.P.1, Pavluchenko A.S.1
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Affiliations:
- Ioffe Physical–Technical Institute
- ZAO EPI-CENTER
- Issue: Vol 50, No 7 (2016)
- Pages: 984-988
- Section: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/197527
- DOI: https://doi.org/10.1134/S1063782616070150
- ID: 197527
Cite item
Abstract
A new method for fabricating transparent conducting coatings based on indium-tin oxide (ITO) with a controlled refractive index is proposed. This method implies the successive deposition of material by electron-beam evaporation and magnetron sputtering. Sputtered coatings with different densities (and, correspondingly, different refractive indices) can be obtained by varying the ratio of the mass fractions of material deposited by different methods. As an example, films with effective refractive indices of 1.2, 1.4, and 1.7 in the wavelength range of 440–460 nm are fabricated. Two-layer ITO coatings with controlled refractive indices of the layers are also formed by the proposed method. Thus, multilayer transparent conducting coatings with desired optical parameters can be produced.
About the authors
M. V. Kukushkin
Ioffe Physical–Technical Institute; ZAO EPI-CENTER
Email: l.markov@mail.ioffe.ru
Russian Federation, Politekhnicheskaya ul. 26, St. Petersburg, 194021; St. Petersburg, 194156
D. A. Zakheim
Ioffe Physical–Technical Institute
Email: l.markov@mail.ioffe.ru
Russian Federation, Politekhnicheskaya ul. 26, St. Petersburg, 194021
S. I. Pavlov
Ioffe Physical–Technical Institute
Email: l.markov@mail.ioffe.ru
Russian Federation, Politekhnicheskaya ul. 26, St. Petersburg, 194021
L. K. Markov
Ioffe Physical–Technical Institute
Author for correspondence.
Email: l.markov@mail.ioffe.ru
Russian Federation, Politekhnicheskaya ul. 26, St. Petersburg, 194021
I. P. Smirnova
Ioffe Physical–Technical Institute
Email: l.markov@mail.ioffe.ru
Russian Federation, Politekhnicheskaya ul. 26, St. Petersburg, 194021
A. S. Pavluchenko
Ioffe Physical–Technical Institute
Email: l.markov@mail.ioffe.ru
Russian Federation, Politekhnicheskaya ul. 26, St. Petersburg, 194021