An Integrated High-Capacitance Varicap Based on Porous Silicon
- Authors: Timoshenkov S.P.1, Boyko A.N.1, Gaev D.S.2, Kalmykov R.M.2
-
Affiliations:
- National Research University of Electronic Technology
- Berbekov Kabardino-Balkarian State University
- Issue: Vol 47, No 7 (2018)
- Pages: 465-467
- Section: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186955
- DOI: https://doi.org/10.1134/S1063739718070156
- ID: 186955
Cite item
Abstract
The potential for use of porous silicon in designing varicaps with high capacitance ratios satisfying the requirements of microelectronics and microsystems engineering is considered. The technique for the fabrication of capacitor structures via the electrodeposition of copper onto porous silicon is presented. The morphological features of the obtained structures are examined and the specific capacitance of varicaps is determined. The prospects for the application of varicaps based on porous silicon in integrated electronics are outlined.
About the authors
S. P. Timoshenkov
National Research University of Electronic Technology
Author for correspondence.
Email: spt@miee.ru
Russian Federation, Moscow, 124498
A. N. Boyko
National Research University of Electronic Technology
Email: spt@miee.ru
Russian Federation, Moscow, 124498
D. S. Gaev
Berbekov Kabardino-Balkarian State University
Email: spt@miee.ru
Russian Federation, Nalchik, 360004
R. M. Kalmykov
Berbekov Kabardino-Balkarian State University
Email: spt@miee.ru
Russian Federation, Nalchik, 360004