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Vol 48, No 7 (2019)

Article

Studies on Charge Carrier Transport in an Injection Laser with Frequency Modulation of the Optical Radiation

Konoplev B.G., Ryndin E.A., Pisarenko I.V.

Abstract

One of the promising approaches to solve the problem of increasing the efficiency for interelement connections consists in the use of integrated optical switching systems, whose main elements represent injection lasers with functionally integrated optical radiation modulators. Injection lasers make it possible to modulate the laser radiation by subpicosecond controlling pulses at a constant pumping current, as well as making it possible to implement the sources and modulators of optical radiation in a united AIIIBV nanoheterostructure with second-type heterojunctions. This work is devoted to the studies concerning the transport of charge carriers within a functionally integrated modulator laser with internal frequency modulation of the generated optical radiation using a proposed two-dimensional diffusion-drift model and a numerical simulation technique. The results of the numerical simulation of charge carrier transport in a modulator laser when the pumping current is switched on, as well as under pulsed variation of the controlling voltage, take the structural features, the transport effects, the mechanisms of stimulated and spontaneous radiative recombination, and the photon lifetime into account. It is shown that the maximum modulation frequency of laser radiation is determined by the subpicosecond time of the controlled spatial relocation of the charge-carrier density maxima in the quantum zones of the modulator laser, as well as by the photon lifetime in the laser resonator, and corresponds to the terahertz range. To increase the maximum modulation frequency, it is necessary to reduce the photon lifetime in the active zone of the modulator laser to values lower than 3 ps by changing the resonator’s parameters in a corresponding manner. The proposed model and the method of numerical simulation make it possible to optimize the parameters of a functionally integrated modulator laser, and to provide the required relationships between the maximum modulation frequency of the optical radiation, the modulation coefficient, and the density of the threshold pumping current.

Russian Microelectronics. 2019;48(7):435-442
pages 435-442 views

A study of the Composition of Tellurium Vapor by the Static Method

Vigdorovich E.N.

Abstract

The static method with the use of a zero-pressure gauge makes it possible to accurately measure the vapor pressure. The data on the temperature dependence of the unsaturated vapor pressure of the substance (in the absence of the condensed phase) in the static experiment allow determining the vapor’s composition. A multicomponent system consisting of molecules containing i number of atoms is considered. Mathematical methods are developed to study the molecular composition of a multicomponent vapor. In combination with the initial equations, a system of n linear equations with n unknowns is obtained. The system of equations is compatible and has a unique solution, since the determinant composed of the coefficients at the unknown partial pressures of the components is different from zero. The composition of tellurium vapor was studied experimentally by the static method. It is shown that tellurium vapor consists mainly of one-, two-, and four-atom molecules in equilibrium (Te2 = 2Te and Te4 = 2Te2). The processing of the experimental data made allows obtaining the equations of the temperature dependence of the constants and reveal the change in the average number of tellurium atoms in the gas phase in a broad range of pressures and temperatures.

Russian Microelectronics. 2019;48(7):443-446
pages 443-446 views

Simulating and Ensuring the Reliability of the Elements and Joints of Three-Dimensional Microelectronics Modules

Pogalov A.I., Blinov G.A., Chugunov E.Y.

Abstract

In order to ensure the operability, durability, and reliability of three-dimensional microelectronic modules, the engineering calculation of the structures, including the simulation of adhesive-bonded joints, as well as a valid choice of materials and constructive decisions, is necessary. The main operational and physical specifications for three-dimensional microelectronic modules and the advantages of the application of adhesive materials in the structures of modules are presented. It is established that the structural strength of three-dimensional microelectronic modules and the operating characteristics of adhesive-bonded joints depend on many factors. The most important factors among them are the properties of the adhesive material, the structure of the joints and the operating conditions. The types of loads, which affect the modules during their operation and their influence on the structural strength are considered. It is revealed that irregular loads, such as peeling and bending, are the most dangerous loading types for the adhesive-bonded joints of modules. It is established that in peeling a high concentration of edge stresses arises, which leads to the destruction of the joints, and in bending there is a concentration of normal and tangential stresses along the length of the glue lines. The types of adhesive materials which are used for assembling the modules are analyzed. The adhesive materials are selected taking the main design and technological constraints and the requirements on adhesive-bonded joints into account. The module’s structures are simulated and the influence of the physical, mechanical, and thermal properties of the adhesive materials on the stresses in the adhesive-bonded joints and the strength of the products under the impact of inertial loads with an acceleration of 1000g and heated by 40°С is determined. Recommendations on the simulation of adhesive-bonded joints of three-dimensional microelectronic modules are made. The obtained results revealed that the stresses depend on the elastic properties of the adhesive-bonded joints, as well as on the nature and value of the load on them, and they are determined by the mechanical strength and rigidity of the adhesive material. In order to reduce the stresses, it is necessary to use more rigid structural materials, and the adhesive materials need to be chosen based on the operating conditions of the microelectronic module.

Russian Microelectronics. 2019;48(7):447-451
pages 447-451 views

Histogram Measurement of ADC Nonlinearities by Using Incomplete-Scale Sine Waves

Rybakov A.A., Reznichenko N.E.

Abstract

To compute nonlinearities, the histogram method, in which the input sine-wave signal has a range exceeding the full scale, is usually employed. In some cases, however, it is required to determine the characteristics of an analog-to-digital (ADC) system for the incomplete-scale sine wave. A method of measuring static ADC errors for the incomplete-scale input sinusoid, which is a modification of the histogram method for a signal exceeding the full scale, is developed. In the standard histogram method, the overlapping of the range of the input voltages corresponding to the full scale is necessary to ensure the fallout of all possible codes at the ADC output in the presence of gain and zero offset errors. The magnitude of the offset in the standard method is determined based on the number of samples that fall outside the operating range of the ADC. In the proposed method, the conditional overlapping of the range is used to determine static ADC errors. The computation of static ADC errors is reduced to calculating the amplitude of the output signal based on the histogram of advantageous ADC codes. The code transition levels are computed; and the offset and gain errors are determined. The proposed method is tested by modeling in MATLAB. The accuracy of the method is consistent with the expected values of the input errors. The proposed method makes it possible to compute the conversion errors of ADC systems with blocks that limit the amplitude of the input ADC signal.

Russian Microelectronics. 2019;48(7):452-456
pages 452-456 views

Junctionless MOS-Transistor with a Low Subthreshold Current

Korolev M.A., Klyuchnikov A.S., Efimova D.I.

Abstract

The junctionless MOS-transistors (junctionless MOSFET) have a number of advantages over conventional transistors in terms of the simplicity of design, manufacturing technology, and reduction of the impact of short-channel effects on the characteristics of the device. However, the well known experimental nanowire junctionless MOSFET have high subthreshold currents due to the appearance of the parasitic bipolar transistor effect in a closed state. The structural model of a planar SOI junctionless MOSFET by the technology standards of 90 nm and the route of mathematical simulation using the Synopsys Sentaurus TCAD environment are developed. The influence of the impurity concentration in a SOI silicon film of a junctionless MOSFET at the threshold voltage, saturation currents, and subthreshold currents is investigated. The research results reveal that at the impurity concentrations in the working channel of the device below 1017 cm–3, when the effect of band-to-band tunneling is absent and the parasitic bipolar transistor effect does not arise, the subthreshold currents decrease up to 10–13 A/μm, which is significantly lower than those of the conventional MOSFET, while maintaining the saturation currents at an acceptable level.

Russian Microelectronics. 2019;48(7):457-461
pages 457-461 views

Developing the Guard Ring Topology of Power Silicon Diodes with a Blocking Voltage of up to 6.7 kV

Sopova O., Kritskaya T.

Abstract

High-voltage fast recovery diodes (FRDs) are characterized by a small forward voltage drop and low power dissipation. The main characteristics of such diodes is the reverse blocking voltage or the breakdown voltage. The aim of this work is to develop a guard ring topology allowing us to obtain the maximum possible blocking voltage of the diode and definite localization of the breakdown place under the conditions of the standard technological processes and without using new materials or substrates. The topology of the high-voltage part of silicon fast recovery power diodes is developed to obtain the maximum reverse blocking voltage. The calculations are carried out in the TCAD environment in the structure editor of which we included a program for the automatic creation of device models with dimensions of about several millimeters. The arrangement of guard rings is calculated according to the proposed principle allowing us to obtain power diodes with different breakdown voltages. The topology is developed so that the breakdown occurs under the edge of the active region, which guarantees the absence of catastrophic failures of the device. Power fast recovery diodes manufactured according to the proposed topology have the maximum reverse blocking voltage within the range of 3.3–6.7 kV, which indicates the reliability of the calculation methodology.

Russian Microelectronics. 2019;48(7):462-466
pages 462-466 views

Simulating the Self-Heating Effect for MOSFETs with Various Configurations of Buried Oxide

Petrosyants K.O., Popov D.A.

Abstract

SOI MOSFETs have the worst properties of heat removal from an active region, which negatively affects the reliability and efficiency of integrated circuits. Using TCAD modeling, we investigate the self-heating effect in the following structures of deeply submicron MOSFETs with different configurations of buried oxide: traditional bulk MOSFET, SOI structure, SELBOX structure, partial SOI structure, thin-BOX SOI structure, UTBB SOI structure, and quasi-SOI structure. It is shown that, for a number of new designs, the maximum temperature in the MOSFET structure is significantly reduced as compared to Тmax of the standard SOI MOSFET structure; it approaches the values typical of standard MOSFETs on bulk silicon.

Russian Microelectronics. 2019;48(7):467-469
pages 467-469 views

Development of an Area Image Sensor Pixel for an X-Ray Detector

Suponnikov D.A., Putilin A.N., Tatarinova E.A., Zhgunev Z.G., Dabagov A.R.

Abstract

Area photodetector devices (image sensors) are the main imaging element of digital X-ray systems used in medicine today. Since the cost of a medical diagnostics error is very high, the requirements imposed on the image sensor are very strict. We consider a sequence of procedures for the development of an area image sensor for biomedical X-ray investigations, which must reliably distinguish low-contrast details down to 80–100 µm. The development is aimed, in particular, at combining different parameters for different tasks, which require either a high frame rate at a low digit capacity or a wide dynamic range in the slow image sensing mode. The most important parameters of an image sensor are the fill factor of an optical pixel (photosensitive cell) and the quantum efficiency. The pixel layout and topology are proposed and a solution of merging the four neighboring photocells in a separate functional group (superpixel) with a large sensitive area and a potential well is found. The calculation and simulation allow us to develop specific recommendations and requirements on the photodetector for the developed X-ray sensitive panel, and determine the frame and bit rate ranges in the transmission lines.

Russian Microelectronics. 2019;48(7):470-476
pages 470-476 views

Methods of Improving the Accuracy of Simulating Delays and Peak Currents of Combinational CMOS-Circuits at the Logical Design Level

Ivanova G.A., Ryzhova D.I.

Abstract

With the reduction of the technological dimensions of transistors, the influence of the variations of circuit and technological parameters on the values of the delay of the elements of combinational CMOS-circuits has grown significantly. Due to the spread of the values of these parameters, the uncertainty of delays appears, which leads to the necessity to define the ranges of possible delay values. The peak current in power lines when switching the inputs of gates is another factor increasingly influencing the design process of CMOS circuits in the transition to nanometer technologies. The value of the peak current is used to estimate the voltage drop in the power lines, which in turn is necessary to calculate the width of the power lines of CMOS circuits and switch off the transistors in the method of reducing the static power. The methods of full circuit simulation do not comprehensively analyze the circuits with a large number of inputs and the methods at the logical level of designing CMOS circuits do not provide the desired accuracy of the evaluation of the values of the delays and the peak current in the circuit. The problem of increasing the accuracy and the reliability of the analysis of the performance and peak currents of CMOS combinational circuits, taking into account the simultaneous switching of the inputs, as well as the analysis of logical correlations of the signals, is considered. The proposed method is based on using the cubic approximation of the correction difference of delays, taking into account the simultaneous switching of inputs. It is shown that the developed techniques of the analysis of the performance and peak currents of CMOS combinational circuits improve the accuracy of the upper estimates of the analyzed parameters by up to 3% compared with accurate simulation and make it possible to reduce the pessimistic upper estimate by factors of 2 to 3 compared with the estimate of the worst case. The developed methods of improving the accuracy of simulating delays and peak currents of combinational CMOS-circuits can be used as an addition to the existing CADS tools for VLSI for noise-immunity analysis, the analysis of the peak currents, characterization of complex functional units, and improving the accuracy of classical static analysis. To improving the accuracy of the interval estimates of the minimum delays and maximum peak current, the simulation methods taking into account the simultaneous switching of the inputs of the logical element are developed. In relation to the circuit simulation, the error of these methods does not exceed 3%. Compared with the results obtained without taking the simultaneous switching into account, reducing the minimum delay by up to 50% and the pessimistic estimate of the peak current of combinational circuits is reduced on average by 50–55%.

Russian Microelectronics. 2019;48(7):477-484
pages 477-484 views

Studying the Influence of Temperature on the Operation of a Resonator of a Frequency Micromechanical Accelerometer

Aung Thura ., Simonov B.M., Timoshenkov S.P., Shilov V.F., Aung K.M.

Abstract

A micromechanical accelerometer (MMA) is used to measure the acceleration based on the change in frequency of the resonator when the acceleration is caused by the displacement of the inertial mass. Its sensitivity can be influenced by factors such as vibration noise and temperature. In this study, using the calculation and modeling in the ANSYS program, the influence of the temperature on the natural oscillation frequency of resonators of various designs has been studied. It is shown that in a number of the studied designs of frequency MMA resonators, the frequency change ∆f0 caused by an increase in temperature is comparable and even exceeds the change in the frequency due to the acceleration effect. It is shown that the known designs of resonators whose operation is based on the oscillations of a beam fixed at both ends do not ensure the stability of oscillations at their natural frequency with a change in temperature. For resonators based on the oscillations of a cantilever beam, the frequency barely changes due to the increase in temperature. The best result from the point of view of the temperature’s stability is obtained for a resonator in the form of a cantilever beam with the beam resonator inside it, for which the frequency change ∆f0 with the temperature increasing up to 70°C was only 4 Hz. The study of the basic MMA construction, consisting of an inertial mass with a resonator made in the form of a cantilever beam with a resonator inside shows that the natural oscillation frequency of this construction is stable when the temperature increases up to 70°C. In this case, the sensitivity is 130 Hz/g and does not depend on temperature.

Russian Microelectronics. 2019;48(7):485-489
pages 485-489 views

Automation of the Measurement Process of the Parameters of the Sensitive Elements of the Gas Flow Rate Sensors

Ryabov V.T., Djuzhev N.A., Novikov D.V.

Abstract

The study of the characteristics and errors of sensors is as difficult as designing and manufacturing them. The operation of sensors needs to be accurately studied in order to correct the design of sensor models accurately carry out the initial calibration of the ready-made sensors. The stand for investigating the sensitive elements of the gas flow rate sensors, in which the hot-wire anemometric and the calorimetric measurement modes are used, is described. It is shown that the facilities of the automatic control of the gas flow rate and dynamic recording of the measurement results make it possible to process and record the results in millisecond time intervals, investigate the operation of sensitive elements in the pulse mode, and simulate the operation of a microprocessor-based signal processing circuit at the hardware and software levels. The proposed stand makes it possible to take measurements at different gas temperatures and ambient temperatures ranging from –40 to 60°С and control the atmospheric pressure, and it makes it possible to specify the gas flow rate within 0–119 L/min. The considered stand is designed to develop compact sensors of the natural gas flow rate, which could replace the diaphragm flowmeters of the G1.6, G2.5, and G4 series. The stand makes it possible to carry out the comprehensive measurements of sensors in one place and considerably reduces the time of testing the developed converters.

Russian Microelectronics. 2019;48(7):490-495
pages 490-495 views

Finite Element Modeling of the Membrane Module

Amelichev V.V., Grigoryev D.M., Reznev A.A.

Abstract

The design and size of the membrane module package have a significant impact on its characteristics. It is necessary to use the finite element modeling calculation of the frequency response of the membrane module’s membrane due to the complexity of the package design. In this study the method of the thin dielectric membrane modeling by the structural and acoustic analysis in the ANSYS software is proposed. This method allows us to perform the calculation taking into account the influence of the front and back chamber size. The dependences of resonance frequency of the front chamber and back chamber on its geometric sizes are obtained. It is shown that by increasing the back chamber size, the value of the membrane sensitivity approaches its value in the open space. The membrane modules’ frequency response is compared and it shown that the presence of the front and back chambers significantly affects the values of the resonance frequency and sensitivity. The method of setting residual stresses in the membrane using thermal impact is used. A complicatedly deformed state of the membrane, called the buckling effect, is obtained. The dielectric membrane’s sensitivity with allowance for the buckling effect is calculated. The results are analyzed and it is shown that the calculated sensitivity of the membrane taking the buckling effect into account has a good coincidence with the measurement results. The proposed method enables us to calculate the membrane module’s frequency response taking the influence of the package design’s peculiarities into account and also the residual stresses in the membrane. The use of structural-acoustic analysis enables us to achieve more accurate results while calculating the membrane frequency response, which increases the efficiency of designing the acoustic pressure transducers, and ensures achieving the product’s optimal characteristics.

Russian Microelectronics. 2019;48(7):496-500
pages 496-500 views

Measurements of the Airflow Velocity Using Ultrasonic Transducers

Panov A.P., Serov A.N.

Abstract

Operation with control systems of moving objects requires taking into account the longitudinal and transverse components of the air flow velocity. For this purpose, the air flow velocity meters utilizing the acoustic method are used. These meters have a short response and no mechanically moving elements. However, their large size and the presence of construction units subjected to considerable deformation under the mechanical impact make it difficult to implement these meters as parts of moving objects. In this work, the operation algorithm of a device measuring the airflow velocity using the ultrasonic transducers is analyzed. We show that the reduction in the size of such devices leads to a decrease in the measurement accuracy without the improvement of the methods for determining the propagation time of an ultrasonic pulse between transducers and without periodic calibration of the device. The block diagram is developed and the main elements are considered for the computing device, which makes it possible to determine the longitudinal and transverse components of the airflow velocity using four ultrasonic transducers. The laboratory tests in an air tunnel with a distance between sensors of 60 mm showed that this device makes it possible to determine the airflow velocity with the maximum absolute measurement error of 2.5 m/s. This error is considerably affected by the structural elements of the device that obscure the measurement area but yield the required strength characteristics. The proposed error compensation algorithm based on the approximation method by trigonometric functions significantly reduces the maximum measurement error to 1.2 m/s. Further improvement of the device’s characteristics requires additional studies to find the shape of the sensor block and refinement of the error compensation algorithms.

Russian Microelectronics. 2019;48(7):501-505
pages 501-505 views

Precision L-Band Analog-Digital Phase Shifter with a 0°–360° Phase Change

Efimov A.G., Kuptsov E.O., Martynova V.P., Spiridonov A.B., Surin Y.V.

Abstract

In modern satellite communication systems and airborne repeaters using an APAR, the receiving and transmitting modules usually consist of discrete phase shifters such as hybrid integrated circuits or monolithic circuits. In this paper, we consider an open-frame analog-digital phase shifter module with a 0°–360° phase change that allows ensuring the accuracy of setting the discrete phase to not more than 0.5° based on the domestic control UHF MIS varicaps. An original L-range analog-digital phase shifter with a 0°–360° phase change using a Lange bridge and phase-shifting cells based on four UHF MIS varicaps is proposed. The requirements for the type of volt-farad characteristic and the capacitance overlap coefficient of the MDP-varicap capacitance are determined. Even at the limiting (critical) UHF MIS-varicap frequency not higher than 15 GHz, the proposed scheme of the analog-digital phase shifter allows ensuring the phase shifter loss that is not greater than 1.5 dB in the L-band. The analog-digital phase shifter with a 0°–360° phase change was operated by the digital control board. An 8-bit DAC was used. The division value of the discrete control of the phase shifter is 1.4° at 256 DAC states. The obtained characteristics of the precision analog-digital phase shifter allow concluding on the propects of its use for solving synchronization problems of an active radio target simulator in testing synthetic aperture radars, as well as in the receiving and transmitting modules of a low-element APAR for the L-band.

Russian Microelectronics. 2019;48(7):506-509
pages 506-509 views

Radio-Wave Method of Control of the Heterogeneity of the Electrophysical Parameters of Dielectrics Using a Scanning Microstrip Line

Baranov A.A., Sergeev V.A.

Abstract

The parameter homogeneity of dielectrics imposes increasingly stringent requirements, especially when used in micro- and nanoelectronics products. In this paper, we present an automated method for monitoring the electrophysical parameters of planar dielectrics with increased requirements on accuracy and resolution. A brief review and comparative analysis of the known methods for monitoring the parameters of solid dielectrics are performed here. The method of microwave control of the heterogeneities of the parameters of planar dielectrics by the wave characteristics of a scanning microstrip line (MSL) using a Radon transform is described. The phase response of the MSL is shown to be most sensitive to parameter heterogeneities. A mathematical model for processing the MSL wave characteristics and for constructing a map of the parameter heterogeneity distribution is presented. The parameter realizability and the applicability limits of the mathematical model are estimated. The technical implementation of the method is considered using, as an example, the setup for monitoring the parameter homogeneity of planar dielectrics and the results of modeling the measuring part of the setup in the AWR Microwave Office CAD system. The methodological errors of measuring the electrophysical parameters of dielectrics by the described method are estimated, and they are on average ±1 × 10–4 in the case of measuring the permittivity and 0.2 mm in the case of measuring the spatial resolution according to the preliminary calculations. The described control method is designed for use in the production of electronic products using dielectric materials with a high level of parameter repeatability.

Russian Microelectronics. 2019;48(7):510-515
pages 510-515 views

Absorbing Elements Based on a Uniform Resistive Film for the Implementation of a Wide Range of Radio Signal Power Attenuations

Sadkov V., Fomina K., Pil’kevich A.

Abstract

Rectangular and complex-shaped absorbing elements based on a uniform resistive film are used for constructing waveguide, coaxial, and microstrip attenuators. A decrease in the attenuator’s dimensions leads to difficulties in the implementation of low and high attenuations, which requires passing to absorbing elements based on piecewise uniform structures. In this work, topologies of small absorbing elements of the waveguide, coaxial, and microstrip attenuators are proposed to implement a wide range of radio signal power attenuations. They differ from the known elements of attenuators with a two-layer resistive film in terms of their lower temperature stability and sophisticated manufacturing technology. Such attenuation is achieved by using a single-layer resistive film with a central region having a high (cut) or low (conductor) specific resistance. A technique based on the rigorous method of conformal mappings for calculating the proposed absorbing elements is developed. In the considered particular cases, the obtained relations coincide with those known in the literature. Three-dimensional plots of radio signal power attenuation and normalized input resistance as functions of the normalized size of the cut or conductor of the central region are presented. A broad range of possibilities of the control for output parameters of absorbing elements are outlined. The working capacity of the technique is verified by modeling both the equivalent circuit parameters and output parameters of the absorbing elements, namely, input resistance and attenuation, as well as by the analysis of real samples of small add-on absorbing elements of microstrip attenuators with the proposed topologies. The modeling is carried out in the Russian Elcut software package.

Russian Microelectronics. 2019;48(7):516-521
pages 516-521 views

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