Structure and Properties of Thin Graphite-Like Films Produced by Magnetron-Assisted Sputtering
- 作者: Vinogradov A.1, Grudinkin S.1, Besedina N.2, Koniakhin S.1,2, Rabchinskii M.1, Eidelman E.1,3, Golubev V.1
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隶属关系:
- Ioffe Institute
- St. Petersburg National Research Academic University
- St. Petersburg State Chemical Pharmaceutical Academy
- 期: 卷 52, 编号 7 (2018)
- 页面: 914-920
- 栏目: Carbon Systems
- URL: https://journals.rcsi.science/1063-7826/article/view/203704
- DOI: https://doi.org/10.1134/S1063782618070266
- ID: 203704
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详细
The structural, electrical, and optical properties of thin graphite-like films produced by magnetron- assisted sputtering onto crystalline silicon and quartz at substrate temperatures in the range from 320 to 620°C are studied. From analysis of the Raman spectra, it is established that, as the substrate temperature is elevated, the crystallite size increases and the concentration of structural defects and the content of amorphous carbon in the phase composition of the films decrease. It is found that, as the substrate temperature is elevated, the maximum of the absorption intensity in the ultraviolet spectral region of the optical absorption spectra shifts to longer wavelengths and the absorption intensity in the visible and near-infrared spectral regions increases. As the deposition temperature is elevated, the conductivity of the films increases from 0.2 Ω–1 cm–1 at 320°C to 30 Ω–1 cm–1 at 620°C.
作者简介
A. Vinogradov
Ioffe Institute
Email: grudink.gvg@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
S. Grudinkin
Ioffe Institute
编辑信件的主要联系方式.
Email: grudink.gvg@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
N. Besedina
St. Petersburg National Research Academic University
Email: grudink.gvg@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
S. Koniakhin
Ioffe Institute; St. Petersburg National Research Academic University
Email: grudink.gvg@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021; St. Petersburg, 194021
M. Rabchinskii
Ioffe Institute
Email: grudink.gvg@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
E. Eidelman
Ioffe Institute; St. Petersburg State Chemical Pharmaceutical Academy
Email: grudink.gvg@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021; St. Petersburg, 197376
V. Golubev
Ioffe Institute
Email: grudink.gvg@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021