Автор туралы ақпарат
Kalinkin, I. P.
Шығарылым | Бөлім | Атауы | Файл |
Том 52, № 6 (2018) | Fabrication, Treatment, and Testing of Materials and Structures | Effect of Chemical Treatment of a Silicon Surface on the Quality and Structure of Silicon-Carbide Epitaxial Films Synthesized by Atom Substitution |