Author Details
Fedotov, S. D.
Issue | Section | Title | File |
Vol 51, No 13 (2017) | Materials for Electronic Engineering | Study of the Structural Properties of Silicon-on-Sapphire Layers in Hydride-Chloride Vapor-Phase Epitaxy | |
Vol 53, No 15 (2019) | Technological Processes and Routes | Investigation of the Initial Silicon-on-Sapphire Layer Formed by CVD Techniques |