Charge density at the Al2O3/Si interface in Metal–lnsulator–Semiconductor devices: Semiclassical and quantum mechanical descriptions
- Authors: Hlali S.1, Hizem N.1, Kalboussi A.1
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Affiliations:
- Laboratoire de Microélectronique et Instrumentation (LR13ES12), Faculté des Sciences de Monastir, Avenue de I’environnement
- Issue: Vol 51, No 12 (2017)
- Pages: 1625-1633
- Section: Semiconductor Structures, Low-Dimensional Systems, and Quantum Phenomena
- URL: https://journals.rcsi.science/1063-7826/article/view/202049
- DOI: https://doi.org/10.1134/S1063782617120089
- ID: 202049
Cite item
Abstract
In this paper, a quantum correction computation of the inversion layer of charge density was investigated. This study is carried out for a one-dimensional Metal–lnsulator–Semiconductor (MIS) structure with (100) oriented P-type silicon as substrate. The purpose of this paper is to point out the differences between the semiclassical and quantum-mechanical charge description at the interface Al2O3/Si, and to identify some electronic properties of our MIS device using different thickness of the high-k oxide and diverse temperature with different carrier statitics (Fermi–Dirak statitics and Boltzmann statitics). In particular, the calculations of capacitance voltage (C–V), sheet electron density, a relative position of subband energies and their wave functions are performed to examine qualitatively and quantitatively the electron states and charging mechanisms in our device.
About the authors
Slah Hlali
Laboratoire de Microélectronique et Instrumentation (LR13ES12), Faculté des Sciences de Monastir, Avenue de I’environnement
Author for correspondence.
Email: hlalislah@yahoo.fr
Tunisia, Monastir, 5019
Neila Hizem
Laboratoire de Microélectronique et Instrumentation (LR13ES12), Faculté des Sciences de Monastir, Avenue de I’environnement
Email: hlalislah@yahoo.fr
Tunisia, Monastir, 5019
Adel Kalboussi
Laboratoire de Microélectronique et Instrumentation (LR13ES12), Faculté des Sciences de Monastir, Avenue de I’environnement
Email: hlalislah@yahoo.fr
Tunisia, Monastir, 5019