Structure of thermoelectric films of higher manganese silicide on silicon according to electron microscopy data
- Authors: Orekhov A.S.1,2, Kamilov T.S.3, Ibragimova B.V.3, Ivakin G.I.1, Klechkovskaya V.V.1
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Affiliations:
- Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics”
- Russian Scientific Center “Kurchatov Institute”
- Tashkent State Technical University named after Abu Raykhan Biruni
- Issue: Vol 51, No 6 (2017)
- Pages: 706-709
- Section: XV International Conference “Thermoelectrics and Their Applications—2016”, St. Petersburg, November 15–16, 2016
- URL: https://journals.rcsi.science/1063-7826/article/view/199977
- DOI: https://doi.org/10.1134/S1063782617060240
- ID: 199977
Cite item
Abstract
The structural features of higher manganese-silicide films obtained by the diffusion doping of single-crystal silicon substrates with manganese vapor in a sealed cell and a flow-through quartz reactor with continuous pumping are comparatively analyzed. Scanning electron microscopy and high-resolution transmission electron microscopy show that a single-phase textured film of higher manganese silicide is formed in the evacuated cell. A change in the growth conditions from steady (cell) to quasi-steady-state (reactor) leads to the formation of polycrystalline islands of higher manganese silicide with nanoscale inclusions of the manganese- monosilicide phase.
About the authors
A. S. Orekhov
Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics”; Russian Scientific Center “Kurchatov Institute”
Author for correspondence.
Email: andrey.orekhov@gmail.com
Russian Federation, Moscow, 119333; Moscow, 123182
T. S. Kamilov
Tashkent State Technical University named after Abu Raykhan Biruni
Email: andrey.orekhov@gmail.com
Uzbekistan, Tashkent, 100095
B. V. Ibragimova
Tashkent State Technical University named after Abu Raykhan Biruni
Email: andrey.orekhov@gmail.com
Uzbekistan, Tashkent, 100095
G. I. Ivakin
Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics”
Email: andrey.orekhov@gmail.com
Russian Federation, Moscow, 119333
V. V. Klechkovskaya
Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics”
Email: andrey.orekhov@gmail.com
Russian Federation, Moscow, 119333