Nanoscale Cu2O films: Radio-frequency magnetron sputtering and structural and optical studies
- Authors: Kudryashov D.A.1, Gudovskikh A.S.1,2, Babichev A.V.3,4,5, Filimonov A.V.3, Mozharov A.M.1, Agekyan V.F.6, Borisov E.V.6, Serov A.Y.6, Filosofov N.G.6
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Affiliations:
- St. Petersburg National Research Academic University — Nanotechnology Research and Education Center
- St. Petersburg State Electrotechnical University LETI
- Connector Optics LLC
- St. Petersburg National Research University of Information Technologies, Mechanics, and Optics
- Ioffe Physical–Technical Institute
- St. Petersburg State University
- Issue: Vol 51, No 1 (2017)
- Pages: 110-114
- Section: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/199360
- DOI: https://doi.org/10.1134/S1063782617010110
- ID: 199360
Cite item
Abstract
Nanoscale copper (I) oxide layers are formed by magnetron-assisted sputtering onto glassy and silicon substrates in an oxygen-free environment at room temperature, and the structural and optical properties of the layers are studied. It is shown that copper oxide formed on a silicon substrate exhibits a lower degree of disorder than that formed on a glassy substrate, which is supported by the observation of a higher intensity and a smaller half-width of reflections in the diffraction pattern. The highest intensity of reflections in the diffraction pattern is observed for Cu2O films grown on silicon at a magnetron power of 150 W. The absorption and transmittance spectra of these Cu2O films are in agreement with the well-known spectra of bulk crystals. In the Raman spectra of the films, phonons inherent in the crystal lattice of cubic Cu2O crystals are identified.
About the authors
D. A. Kudryashov
St. Petersburg National Research Academic University — Nanotechnology Research and Education Center
Author for correspondence.
Email: kudryashovda@apbau.ru
Russian Federation, St. Petersburg, 194021
A. S. Gudovskikh
St. Petersburg National Research Academic University — Nanotechnology Research and Education Center; St. Petersburg State Electrotechnical University LETI
Email: kudryashovda@apbau.ru
Russian Federation, St. Petersburg, 194021; St. Petersburg, 197376
A. V. Babichev
Connector Optics LLC; St. Petersburg National Research University of Information Technologies, Mechanics, and Optics; Ioffe Physical–Technical Institute
Email: kudryashovda@apbau.ru
Russian Federation, St. Petersburg, 194292; St. Petersburg, 197101; St. Petersburg, 194021
A. V. Filimonov
Connector Optics LLC
Email: kudryashovda@apbau.ru
Russian Federation, St. Petersburg, 194292
A. M. Mozharov
St. Petersburg National Research Academic University — Nanotechnology Research and Education Center
Email: kudryashovda@apbau.ru
Russian Federation, St. Petersburg, 194021
V. F. Agekyan
St. Petersburg State University
Email: kudryashovda@apbau.ru
Russian Federation, St. Petersburg, 199034
E. V. Borisov
St. Petersburg State University
Email: kudryashovda@apbau.ru
Russian Federation, St. Petersburg, 199034
A. Yu. Serov
St. Petersburg State University
Email: kudryashovda@apbau.ru
Russian Federation, St. Petersburg, 199034
N. G. Filosofov
St. Petersburg State University
Email: kudryashovda@apbau.ru
Russian Federation, St. Petersburg, 199034