Study of the phase composition of nanostructures produced by the local anodic oxidation of titanium films
- Authors: Avilov V.I.1, Ageev O.A.1, Konoplev B.G.1, Smirnov V.A.1, Solodovnik M.S.1, Tsukanova O.G.1
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Affiliations:
- Institute of Nanotechnologies, Electronics, and Equipment Engineering
- Issue: Vol 50, No 5 (2016)
- Pages: 601-606
- Section: Semiconductor Structures, Low-Dimensional Systems, and Quantum Phenomena
- URL: https://journals.rcsi.science/1063-7826/article/view/197070
- DOI: https://doi.org/10.1134/S1063782616050043
- ID: 197070
Cite item
Abstract
The results of experimental studies of the phase composition of oxide nanostructures formed by the local anodic oxidation of a titanium thin film are reported. The data of the phase analysis of titanium-oxide nanostructures are obtained by X-ray photoelectron spectroscopy in the ion profiling mode of measurements. It is established that the surface of titanium-oxide nanostructures 4.5 ± 0.2 nm in height possesses a binding energy of core levels characteristic of TiO2 (458.4 eV). By analyzing the titanium-oxide nanostructures in depth by X-ray photoelectron spectroscopy, the formation of phases with binding energies of core levels characteristic of Ti2O3 (456.6 eV) and TiO (454.8 eV) is established. The results can be used in developing the technological processes of the formation of a future electronic-component base for nanoelectronics on the basis of titanium-oxide nanostructures and probe nanotechnologies.
About the authors
V. I. Avilov
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Email: ttismirnov@gmail.com
Russian Federation, Taganrog, 347928
O. A. Ageev
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Email: ttismirnov@gmail.com
Russian Federation, Taganrog, 347928
B. G. Konoplev
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Email: ttismirnov@gmail.com
Russian Federation, Taganrog, 347928
V. A. Smirnov
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Author for correspondence.
Email: ttismirnov@gmail.com
Russian Federation, Taganrog, 347928
M. S. Solodovnik
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Email: ttismirnov@gmail.com
Russian Federation, Taganrog, 347928
O. G. Tsukanova
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Email: ttismirnov@gmail.com
Russian Federation, Taganrog, 347928