Layer-by-Layer Analysis of the Thickness Distribution of Silicon Dioxide in the Structure SiO2/Si(111) by Inelastic Electron Scattering Cross-Section Spectroscopy
- Authors: Pchelyakov O.P.1, Mikhlin Y.L.2, Parshin A.S.3, Kushchenkov S.A.3
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Affiliations:
- Rzhanov Institute of Semiconductor Physics
- Institute of Chemistry and Chemical Technology
- Siberian State Aerospace University
- Issue: Vol 50, No 3 (2016)
- Pages: 339-344
- Section: Semiconductor Structures, Low-Dimensional Systems, and Quantum Phenomena
- URL: https://journals.rcsi.science/1063-7826/article/view/196883
- DOI: https://doi.org/10.1134/S1063782616030179
- ID: 196883
Cite item
Abstract
The SiO2-concentration profile in the structure SiO2/Si(111) is determined from experimental spectra of the cross section for the inelastic scattering of reflected electrons in the primary electron energy range from 300 to 3000 eV. The spectra are analyzed with the use of a proposed algorithm and developed computer program for simulating the spectra of the cross section for the inelastic scattering of reflected electrons for layered structures with an arbitrary number of layers, arbitrary thickness, and variable concentration of components in each layer. The best agreement between the calculated and experimental spectra is attained by varying the silicon dioxide and silicon concentrations in each layer. The results obtained can be used for profiling film-substrate structures with an arbitrary composition.
About the authors
O. P. Pchelyakov
Rzhanov Institute of Semiconductor Physics
Email: info@sibsau.ru
Russian Federation, Novosibirsk, 630090
Yu. L. Mikhlin
Institute of Chemistry and Chemical Technology
Email: info@sibsau.ru
Russian Federation, Krasnoyarsk, 660036
A. S. Parshin
Siberian State Aerospace University
Author for correspondence.
Email: info@sibsau.ru
Russian Federation, Krasnoyarsk, 660014
S. A. Kushchenkov
Siberian State Aerospace University
Email: info@sibsau.ru
Russian Federation, Krasnoyarsk, 660014