Mikroèlektronika
ISSN 0544-1269 (Print)
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Author Details
Author Details
Murin, D. B.
Issue
Section
Title
File
Vol 52, No 1 (2023)
ДИАГНОСТИКА
Controlling Silicon Etching Parameters in RF CHF3 Plasma by Optical Emission Spectroscopy
Vol 52, No 5 (2023)
ДИАГНОСТИКА
Electrophysical Parameters and Emission Spectra of the Glow Discharge of Difluorodichloromethane
Vol 52, No 6 (2023)
ДИАГНОСТИКА
PROBE AND SPECTRAL DIAGNOSTICS OF PLASMA GAS ENVIRONMENT: BCl3-Cl2
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