Three-Axis Micro-Opto-Electro-Mechanical Angular Velocity Transducer Based on the Optical Tunneling Effect
- Авторлар: Busurin V.I.1, Fam A.T.1, Zheglov M.A.2, Medvedev V.M.1,2
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Мекемелер:
- Moscow Aviation Institute
- State Scientific Research Institute of Instrument Making
- Шығарылым: Том 53, № 6 (2017)
- Беттер: 562-569
- Бөлім: Modeling in Physical and Technical Research
- URL: https://journals.rcsi.science/8756-6990/article/view/212272
- DOI: https://doi.org/10.3103/S8756699017060048
- ID: 212272
Дәйексөз келтіру
Аннотация
A three-axis micro-opto-electro-mechanical (MOEM) angular velocity transducer model based on the optical tunneling effect was developed. The transfer function was determined, and the effect of destabilizing factors on the characteristics of the three-axis MOEM angular velocity transducer was evaluated. The dynamic range of the MOEM transducer based on the optical tunneling effect was calculated.
Негізгі сөздер
Авторлар туралы
V. Busurin
Moscow Aviation Institute
Хат алмасуға жауапты Автор.
Email: vbusurin@mail.ru
Ресей, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993
A. Fam
Moscow Aviation Institute
Email: vbusurin@mail.ru
Ресей, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993
M. Zheglov
State Scientific Research Institute of Instrument Making
Email: vbusurin@mail.ru
Ресей, pr. Mira 125, Moscow, 129226
V. Medvedev
Moscow Aviation Institute; State Scientific Research Institute of Instrument Making
Email: vbusurin@mail.ru
Ресей, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993; pr. Mira 125, Moscow, 129226
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