Three-Axis Micro-Opto-Electro-Mechanical Angular Velocity Transducer Based on the Optical Tunneling Effect


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Аннотация

A three-axis micro-opto-electro-mechanical (MOEM) angular velocity transducer model based on the optical tunneling effect was developed. The transfer function was determined, and the effect of destabilizing factors on the characteristics of the three-axis MOEM angular velocity transducer was evaluated. The dynamic range of the MOEM transducer based on the optical tunneling effect was calculated.

Авторлар туралы

V. Busurin

Moscow Aviation Institute

Хат алмасуға жауапты Автор.
Email: vbusurin@mail.ru
Ресей, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993

A. Fam

Moscow Aviation Institute

Email: vbusurin@mail.ru
Ресей, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993

M. Zheglov

State Scientific Research Institute of Instrument Making

Email: vbusurin@mail.ru
Ресей, pr. Mira 125, Moscow, 129226

V. Medvedev

Moscow Aviation Institute; State Scientific Research Institute of Instrument Making

Email: vbusurin@mail.ru
Ресей, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993; pr. Mira 125, Moscow, 129226

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