Email this article Three-Axis Micro-Opto-Electro-Mechanical Angular Velocity Transducer Based on the Optical Tunneling Effect
- Authors: Busurin V.I.1, Fam A.T.1, Zheglov M.A.2, Medvedev V.M.1,2
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Affiliations:
- Moscow Aviation Institute
- State Scientific Research Institute of Instrument Making
- Issue: Vol 53, No 6 (2017)
- Pages: 562-569
- Section: Modeling in Physical and Technical Research
- URL: https://journals.rcsi.science/8756-6990/article/view/212272
- DOI: https://doi.org/10.3103/S8756699017060048
- ID: 212272
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Abstract
A three-axis micro-opto-electro-mechanical (MOEM) angular velocity transducer model based on the optical tunneling effect was developed. The transfer function was determined, and the effect of destabilizing factors on the characteristics of the three-axis MOEM angular velocity transducer was evaluated. The dynamic range of the MOEM transducer based on the optical tunneling effect was calculated.
About the authors
V. I. Busurin
Moscow Aviation Institute
Author for correspondence.
Email: vbusurin@mail.ru
Russian Federation, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993
A. T. Fam
Moscow Aviation Institute
Email: vbusurin@mail.ru
Russian Federation, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993
M. A. Zheglov
State Scientific Research Institute of Instrument Making
Email: vbusurin@mail.ru
Russian Federation, pr. Mira 125, Moscow, 129226
V. M. Medvedev
Moscow Aviation Institute; State Scientific Research Institute of Instrument Making
Email: vbusurin@mail.ru
Russian Federation, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993; pr. Mira 125, Moscow, 129226
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