电邮这篇文章 Three-Axis Micro-Opto-Electro-Mechanical Angular Velocity Transducer Based on the Optical Tunneling Effect
- 作者: Busurin V.I.1, Fam A.T.1, Zheglov M.A.2, Medvedev V.M.1,2
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隶属关系:
- Moscow Aviation Institute
- State Scientific Research Institute of Instrument Making
- 期: 卷 53, 编号 6 (2017)
- 页面: 562-569
- 栏目: Modeling in Physical and Technical Research
- URL: https://journals.rcsi.science/8756-6990/article/view/212272
- DOI: https://doi.org/10.3103/S8756699017060048
- ID: 212272
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详细
A three-axis micro-opto-electro-mechanical (MOEM) angular velocity transducer model based on the optical tunneling effect was developed. The transfer function was determined, and the effect of destabilizing factors on the characteristics of the three-axis MOEM angular velocity transducer was evaluated. The dynamic range of the MOEM transducer based on the optical tunneling effect was calculated.
作者简介
V. Busurin
Moscow Aviation Institute
编辑信件的主要联系方式.
Email: vbusurin@mail.ru
俄罗斯联邦, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993
A. Fam
Moscow Aviation Institute
Email: vbusurin@mail.ru
俄罗斯联邦, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993
M. Zheglov
State Scientific Research Institute of Instrument Making
Email: vbusurin@mail.ru
俄罗斯联邦, pr. Mira 125, Moscow, 129226
V. Medvedev
Moscow Aviation Institute; State Scientific Research Institute of Instrument Making
Email: vbusurin@mail.ru
俄罗斯联邦, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993; pr. Mira 125, Moscow, 129226
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