Three-Axis Micro-Opto-Electro-Mechanical Angular Velocity Transducer Based on the Optical Tunneling Effect
- Авторы: Busurin V.I.1, Fam A.T.1, Zheglov M.A.2, Medvedev V.M.1,2
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Учреждения:
- Moscow Aviation Institute
- State Scientific Research Institute of Instrument Making
- Выпуск: Том 53, № 6 (2017)
- Страницы: 562-569
- Раздел: Modeling in Physical and Technical Research
- URL: https://journals.rcsi.science/8756-6990/article/view/212272
- DOI: https://doi.org/10.3103/S8756699017060048
- ID: 212272
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Аннотация
A three-axis micro-opto-electro-mechanical (MOEM) angular velocity transducer model based on the optical tunneling effect was developed. The transfer function was determined, and the effect of destabilizing factors on the characteristics of the three-axis MOEM angular velocity transducer was evaluated. The dynamic range of the MOEM transducer based on the optical tunneling effect was calculated.
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Об авторах
V. Busurin
Moscow Aviation Institute
Автор, ответственный за переписку.
Email: vbusurin@mail.ru
Россия, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993
A. Fam
Moscow Aviation Institute
Email: vbusurin@mail.ru
Россия, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993
M. Zheglov
State Scientific Research Institute of Instrument Making
Email: vbusurin@mail.ru
Россия, pr. Mira 125, Moscow, 129226
V. Medvedev
Moscow Aviation Institute; State Scientific Research Institute of Instrument Making
Email: vbusurin@mail.ru
Россия, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993; pr. Mira 125, Moscow, 129226
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