Three-Axis Micro-Opto-Electro-Mechanical Angular Velocity Transducer Based on the Optical Tunneling Effect


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Resumo

A three-axis micro-opto-electro-mechanical (MOEM) angular velocity transducer model based on the optical tunneling effect was developed. The transfer function was determined, and the effect of destabilizing factors on the characteristics of the three-axis MOEM angular velocity transducer was evaluated. The dynamic range of the MOEM transducer based on the optical tunneling effect was calculated.

Sobre autores

V. Busurin

Moscow Aviation Institute

Autor responsável pela correspondência
Email: vbusurin@mail.ru
Rússia, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993

A. Fam

Moscow Aviation Institute

Email: vbusurin@mail.ru
Rússia, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993

M. Zheglov

State Scientific Research Institute of Instrument Making

Email: vbusurin@mail.ru
Rússia, pr. Mira 125, Moscow, 129226

V. Medvedev

Moscow Aviation Institute; State Scientific Research Institute of Instrument Making

Email: vbusurin@mail.ru
Rússia, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow, 125993; pr. Mira 125, Moscow, 129226

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