


Vol 55, No 2 (2019)
- Year: 2019
- Articles: 13
- URL: https://journals.rcsi.science/8756-6990/issue/view/13228
Physical and Engineering Fundamentals of Microelectronics and Optoelectronics
Vacuum Ultraviolet and Soft X-ray Broadband Monochromator for a Synchrotron Radiation Metrological Station
Abstract
The monochromator of the Kosmos synchrotron radiation metrology station is discussed. The results of testing the monochromator in the energy range 2000–6000 eV using Si (111) crystals are presented. A spectral resolution ΔE/E = 10−4 was obtained. A technique for checking the spectral purity of the monochromatic radiation is described. It is shown that the monochromator can be used for spectroscopic measurements in the indicated energy range.



Implementation of Terahertz High-Pass Filters Based on All-Metal Microstructures using Deep X-ray Lithography
Abstract
A method for fabricating high-pass terahertz quasi-optical filters in the form of thick (up to 1 mm in thickness) self-bearing copper microstructures of subwavelength topology is described. This method is based on forming a high-aspect-ratio mask of SU-8 resist on a silicon wafer via deep X-ray lithography through a tungsten X-ray mask followed by electroplating a copper layer through the resistive mask. An example of a 212-µm thick structure with a cutoff frequency of 0.42 THz having the geometry of hexagon-shaped through-holes arranged on a triangular lattice is considered. The results of broadband THz characterization and electromagnetic analysis of the structure fabricated are presented.



X-ray Diffraction Tomography Using Laboratory Sources for Studying Single Dislocations in a Low Absorbing Silicon Single Crystal
Abstract
This paper is a continuation of previous studies on the development of X-ray topo-tomography using laboratory equipment. The results on the spatial location of a single polygonal dislocation half-loop in a silicon single crystal were obtained as a result of testing the sensitivity of the X-ray topo-tomo diffractometer. A comparison was made with high-resolution experimental data obtained at the European synchrotron radiation facility (ESRF). The experimental procedure, software, and hardware for 3D reconstruction of the investigated single defect — a polygonal dislocation half-loop — are described.



Structure of Ni3Al Single Crystal after Severe Plastic Deformation
Abstract
Synchrotron X-ray diffraction study of L12 ordered Ni3Al single crystals was performed. The ultrafine-grained structure resulting from severe plastic deformation was studied. In the initial state, the ordered single crystal is oriented along the [211] compression axis. Along with the ordered phase, there is a small fraction of disordered crystal oriented along the [100] axis. Compression of the samples and subsequent torsion at different angles led to disturbance of the single crystallinity of the sample and a change in the state of the atomic order up to the disappearance of the L12 superstructure.



Methods of Preprocessing Tomographic Images Taking into Account the Thermal Instability of the X-ray Tube
Abstract
For correct numerical interpretation of tomographic images, i.e., estimates of the attenuation coefficients of objects, it is important to obtain reconstruction of high quality, which depends directly on the methods of processing experimental data. Data processing flow begins with its preparation for the application of the reconstruction algorithm. The necessary part of data processing contains the subtraction of the black field, normalization considering empty data, and taking logarithm. This part is not sufficient for obtaining high-quality reconstruction when working with real data since it is not ideal. Real data include noise and distortions due to changes in the setup geometrical parameters during the experiment. We have analyzed two possible types of data distortions during experiment and suggested corrections for them. The first one corrects thermal shifts regarding beam decentralization, and the second eliminates the effect of the polychromatic nature of X-ray radiation on the results of tomographic reconstruction. These methods were tested with both real and synthetic data. Both synthetic and real experiments show that suggested methods improve the reconstruction quality. In real experiments, the level of agreement between the automatic parameter adjustment and experts is about 90%.



Elements of the Terahertz Power Reflective Optics with Free-Form Surfaces
Abstract
Micromilling technologies are used to design and experimentally study terahertz power reflective optical elements with free-form surfaces. The results of the experimental study are in good agreement with theoretical estimates. It is shown that the technique used in this paper makes it possible to develop terahertz focusing reflective elements with energy efficiency above 94%.



Gigahertz MEMS Clock Generator
Abstract
An intensely developing aspect of advanced microelectronics is microelectromechanical systems (MEMS). The present paper describes various issues associated with the development of a new MEMS clock generator capable of operating at gigahertz frequencies. The main features of generating and supporting forced oscillations of the moving electrode under the action of electrostatic forces are analyzed. A possibility of supporting such oscillations under conditions of high inertial g-loads (up to 106g and more) is demonstrated. A mathematical model of a micro-oscillator is developed, and the basic regimes of its operation are described.



Real-Time Control of Nonflatness of Components of Infrared-Range Flip-Chip Photodetectors
Abstract
A possibility of using the autocollimation and interference methods for real-time nondestructive check of the wafer nonflatness of photodetector arrays that are sensitive in the infrared range and are fabricated by the flip-chip technology is considered. These methods allow monitoring the wafer nonflatness and the maximum deflections. These methods are applied in the present study to measure the wafer nonflatness of fragments of silicon slices and arrays of photosensitive elements on GaAs substrates, as well as the wafer nonflatness of photodetectors at different stages of fracture and in the course of thermal cycling.



Analysis and Synthesis of Signals and Images
Combined Method of Visualization of Functionally Defined Surfaces and Three-Dimensional Textures
Abstract
A combined method of object visualization based on analytical and scalar perturbation functions and three-dimensional textures with the use of graphics processing units is proposed. To display the terrain and the change in levels of detail, the same method as that for color textures is applied, and vertex shaders are used in the case of scattered light. A method of real-time visualization of volumetric clouds is described. For this purpose, it is proposed to form three-dimensional textures by means of pre-processing of the cloud structure and volume-oriented visualization.



Methods of Mobile Robot Visual Navigation and Environment Mapping
Abstract
State-of-the-art methods of visual navigation for mobile robots are considered. A hierarchical representation structure of the environment corresponding to the hierarchical organization of the mobile robot control system is proposed. State-of-the-art approaches to constructing map models are presented. Their development will bring the navigation system closer to that formed by the human intellect and combines vision and a semantic view of the world within cognitive maps.



Automation Systems in Scientific Research and Industry
Automatic Verification of Control Software in Cyber-Physical Systems with Plant Simulators
Abstract
The paper describes solving the problem of automatic verification of control software in cyber-physical systems created by means of process-oriented programming. A method based on plant simulators is proposed, and its implementation on the basis of the LabVIEW package and Reflex language translator is described.



Adaptation of the Process-Oriented Approach to the Development of Embedded Microcontroller Systems
Abstract
Adaptation of the process-oriented approach to programming of microcontrollers in embedded systems is described. Specific features of control software and programming of microcontrollers are analyzed. A mathematical model of the control software, which implies a mechanism of the description of microcontroller interruptions in the form of hyperprocesses, is proposed, and its dynamic semantics is provided. The model proposed in the study is a conceptual framework for the development of specialized languages of process-oriented programming of embedded systems.



Modeling of the Tonal Noise Characteristics in a Foil Flow by using Machine Learning
Abstract
A machine learning approach for prediction the characteristics of tonal noise formed in a foil flow is tested. Experimental data are used to construct and analyze the mathematical models of pressure amplitude regression and models of classification of regimes of high-level tonal noise coming from the dimensionless parameters of the flow. Different families of algorithms are considered: from linear models to artificial neural networks. It is shown that a gradient boosting model with a determination coefficient 95% is the most accurate for describing and predicting the spectral curves of acoustic pressure on the entire interval of values of amplitudes and characteristic frequencies.


