Email this article Gigahertz MEMS Clock Generator
- Authors: Kostsov E.G.1, Sokolov A.A.1
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Affiliations:
- Institute of Automation and Electrometry, Siberian Branch
- Issue: Vol 55, No 2 (2019)
- Pages: 154-161
- Section: Physical and Engineering Fundamentals of Microelectronics and Optoelectronics
- URL: https://journals.rcsi.science/8756-6990/article/view/212709
- DOI: https://doi.org/10.3103/S8756699019020079
- ID: 212709
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Abstract
An intensely developing aspect of advanced microelectronics is microelectromechanical systems (MEMS). The present paper describes various issues associated with the development of a new MEMS clock generator capable of operating at gigahertz frequencies. The main features of generating and supporting forced oscillations of the moving electrode under the action of electrostatic forces are analyzed. A possibility of supporting such oscillations under conditions of high inertial g-loads (up to 106g and more) is demonstrated. A mathematical model of a micro-oscillator is developed, and the basic regimes of its operation are described.
About the authors
E. G. Kostsov
Institute of Automation and Electrometry, Siberian Branch
Author for correspondence.
Email: kostsov@iae.nsk.su
Russian Federation, pr. Akademika Koptyuga 1, Novosibirsk, 630090
A. A. Sokolov
Institute of Automation and Electrometry, Siberian Branch
Email: kostsov@iae.nsk.su
Russian Federation, pr. Akademika Koptyuga 1, Novosibirsk, 630090
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