Comprehensive Research on the Response of MIS Sensors of Pd‒SiO2‒Si and Pd‒Ta2O5‒SiO2‒Si Structures to Various Gases in Air
- Autores: Bolodurin B.1, Korchak V.2, Litvinov A.3, Mikhailov A.1, Nozdrya D.3, Pomazan Y.2, Filipchuk D.1,3, Etrekova M.1,3
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Afiliações:
- INKRAM Research and Production Company
- Section for Problems
- MEPhI National Research Nuclear University
- Edição: Volume 88, Nº 12 (2018)
- Páginas: 2732-2739
- Seção: Article
- URL: https://journals.rcsi.science/1070-3632/article/view/222640
- DOI: https://doi.org/10.1134/S1070363218120435
- ID: 222640
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Resumo
The response Pd–SiO2–Si and Pd–Ta2O5–SiO2–Si metal‒insulator‒semiconductor (MIS) sensors to H2, H2S, NO2, C2H5SH, NH3, and Cl2 in air was studied. The static and dynamic characteristics of the MIS sensors were obtained. The minimum detectable concentrations of the test gases were determined. It is shown that the MIS sensors are highly sensitive to the studied gases.
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Sobre autores
B. Bolodurin
INKRAM Research and Production Company
Email: mikhailov@inkram.ru
Rússia, Lyublinskaya ul. 151, office XIII, rooms 67–68, Moscow, 109341
V. Korchak
Section for Problems
Email: mikhailov@inkram.ru
Rússia, Moscow
A. Litvinov
MEPhI National Research Nuclear University
Email: mikhailov@inkram.ru
Rússia, Moscow
A. Mikhailov
INKRAM Research and Production Company
Autor responsável pela correspondência
Email: mikhailov@inkram.ru
Rússia, Lyublinskaya ul. 151, office XIII, rooms 67–68, Moscow, 109341
D. Nozdrya
MEPhI National Research Nuclear University
Email: mikhailov@inkram.ru
Rússia, Moscow
Yu. Pomazan
Section for Problems
Email: mikhailov@inkram.ru
Rússia, Moscow
D. Filipchuk
INKRAM Research and Production Company; MEPhI National Research Nuclear University
Email: mikhailov@inkram.ru
Rússia, Lyublinskaya ul. 151, office XIII, rooms 67–68, Moscow, 109341; Moscow
M. Etrekova
INKRAM Research and Production Company; MEPhI National Research Nuclear University
Email: mikhailov@inkram.ru
Rússia, Lyublinskaya ul. 151, office XIII, rooms 67–68, Moscow, 109341; Moscow