Comprehensive Research on the Response of MIS Sensors of Pd‒SiO2‒Si and Pd‒Ta2O5‒SiO2‒Si Structures to Various Gases in Air
- Авторлар: Bolodurin B.1, Korchak V.2, Litvinov A.3, Mikhailov A.1, Nozdrya D.3, Pomazan Y.2, Filipchuk D.1,3, Etrekova M.1,3
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Мекемелер:
- INKRAM Research and Production Company
- Section for Problems
- MEPhI National Research Nuclear University
- Шығарылым: Том 88, № 12 (2018)
- Беттер: 2732-2739
- Бөлім: Article
- URL: https://journals.rcsi.science/1070-3632/article/view/222640
- DOI: https://doi.org/10.1134/S1070363218120435
- ID: 222640
Дәйексөз келтіру
Аннотация
The response Pd–SiO2–Si and Pd–Ta2O5–SiO2–Si metal‒insulator‒semiconductor (MIS) sensors to H2, H2S, NO2, C2H5SH, NH3, and Cl2 in air was studied. The static and dynamic characteristics of the MIS sensors were obtained. The minimum detectable concentrations of the test gases were determined. It is shown that the MIS sensors are highly sensitive to the studied gases.
Негізгі сөздер
Авторлар туралы
B. Bolodurin
INKRAM Research and Production Company
Email: mikhailov@inkram.ru
Ресей, Lyublinskaya ul. 151, office XIII, rooms 67–68, Moscow, 109341
V. Korchak
Section for Problems
Email: mikhailov@inkram.ru
Ресей, Moscow
A. Litvinov
MEPhI National Research Nuclear University
Email: mikhailov@inkram.ru
Ресей, Moscow
A. Mikhailov
INKRAM Research and Production Company
Хат алмасуға жауапты Автор.
Email: mikhailov@inkram.ru
Ресей, Lyublinskaya ul. 151, office XIII, rooms 67–68, Moscow, 109341
D. Nozdrya
MEPhI National Research Nuclear University
Email: mikhailov@inkram.ru
Ресей, Moscow
Yu. Pomazan
Section for Problems
Email: mikhailov@inkram.ru
Ресей, Moscow
D. Filipchuk
INKRAM Research and Production Company; MEPhI National Research Nuclear University
Email: mikhailov@inkram.ru
Ресей, Lyublinskaya ul. 151, office XIII, rooms 67–68, Moscow, 109341; Moscow
M. Etrekova
INKRAM Research and Production Company; MEPhI National Research Nuclear University
Email: mikhailov@inkram.ru
Ресей, Lyublinskaya ul. 151, office XIII, rooms 67–68, Moscow, 109341; Moscow