Comprehensive Research on the Response of MIS Sensors of Pd‒SiO2‒Si and Pd‒Ta2O5‒SiO2‒Si Structures to Various Gases in Air
- 作者: Bolodurin B.1, Korchak V.2, Litvinov A.3, Mikhailov A.1, Nozdrya D.3, Pomazan Y.2, Filipchuk D.1,3, Etrekova M.1,3
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隶属关系:
- INKRAM Research and Production Company
- Section for Problems
- MEPhI National Research Nuclear University
- 期: 卷 88, 编号 12 (2018)
- 页面: 2732-2739
- 栏目: Article
- URL: https://journals.rcsi.science/1070-3632/article/view/222640
- DOI: https://doi.org/10.1134/S1070363218120435
- ID: 222640
如何引用文章
详细
The response Pd–SiO2–Si and Pd–Ta2O5–SiO2–Si metal‒insulator‒semiconductor (MIS) sensors to H2, H2S, NO2, C2H5SH, NH3, and Cl2 in air was studied. The static and dynamic characteristics of the MIS sensors were obtained. The minimum detectable concentrations of the test gases were determined. It is shown that the MIS sensors are highly sensitive to the studied gases.
作者简介
B. Bolodurin
INKRAM Research and Production Company
Email: mikhailov@inkram.ru
俄罗斯联邦, Lyublinskaya ul. 151, office XIII, rooms 67–68, Moscow, 109341
V. Korchak
Section for Problems
Email: mikhailov@inkram.ru
俄罗斯联邦, Moscow
A. Litvinov
MEPhI National Research Nuclear University
Email: mikhailov@inkram.ru
俄罗斯联邦, Moscow
A. Mikhailov
INKRAM Research and Production Company
编辑信件的主要联系方式.
Email: mikhailov@inkram.ru
俄罗斯联邦, Lyublinskaya ul. 151, office XIII, rooms 67–68, Moscow, 109341
D. Nozdrya
MEPhI National Research Nuclear University
Email: mikhailov@inkram.ru
俄罗斯联邦, Moscow
Yu. Pomazan
Section for Problems
Email: mikhailov@inkram.ru
俄罗斯联邦, Moscow
D. Filipchuk
INKRAM Research and Production Company; MEPhI National Research Nuclear University
Email: mikhailov@inkram.ru
俄罗斯联邦, Lyublinskaya ul. 151, office XIII, rooms 67–68, Moscow, 109341; Moscow
M. Etrekova
INKRAM Research and Production Company; MEPhI National Research Nuclear University
Email: mikhailov@inkram.ru
俄罗斯联邦, Lyublinskaya ul. 151, office XIII, rooms 67–68, Moscow, 109341; Moscow