Мақаланы E-mail арқылы жіберу Specific features of the formation of oblique texture in aluminum nitride films
- Авторлар: Luzanov V.1
-
Мекемелер:
- Kotel’nikov Institute of Radio Engineering and Electronics (Fryazino Branch)
- Шығарылым: Том 62, № 10 (2017)
- Беттер: 1182-1183
- Бөлім: Nanoelectronics
- URL: https://journals.rcsi.science/1064-2269/article/view/198886
- DOI: https://doi.org/10.1134/S1064226917090157
- ID: 198886
Дәйексөз келтіру
Ашық рұқсат
Рұқсат берілді
Тек жазылушылар үшін
Аннотация
Aluminum nitride films with oblique orientation of the texture axis are produced. Modifications of crystal structure depending on the deposition rate are studied. Two effects of the film growth related to the relation of the deposition rate and surface mobility of substance are analyzed.
Авторлар туралы
V. Luzanov
Kotel’nikov Institute of Radio Engineering and Electronics (Fryazino Branch)
Хат алмасуға жауапты Автор.
Email: valery@luzanov.ru
Ресей, Fryazino, Moscow oblast, 141190
