电邮这篇文章 Specific features of the formation of oblique texture in aluminum nitride films
- 作者: Luzanov V.1
-
隶属关系:
- Kotel’nikov Institute of Radio Engineering and Electronics (Fryazino Branch)
- 期: 卷 62, 编号 10 (2017)
- 页面: 1182-1183
- 栏目: Nanoelectronics
- URL: https://journals.rcsi.science/1064-2269/article/view/198886
- DOI: https://doi.org/10.1134/S1064226917090157
- ID: 198886
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详细
Aluminum nitride films with oblique orientation of the texture axis are produced. Modifications of crystal structure depending on the deposition rate are studied. Two effects of the film growth related to the relation of the deposition rate and surface mobility of substance are analyzed.
作者简介
V. Luzanov
Kotel’nikov Institute of Radio Engineering and Electronics (Fryazino Branch)
编辑信件的主要联系方式.
Email: valery@luzanov.ru
俄罗斯联邦, Fryazino, Moscow oblast, 141190
