Отправить статью по E-mail Specific features of the formation of oblique texture in aluminum nitride films
- Авторы: Luzanov V.1
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Учреждения:
- Kotel’nikov Institute of Radio Engineering and Electronics (Fryazino Branch)
- Выпуск: Том 62, № 10 (2017)
- Страницы: 1182-1183
- Раздел: Nanoelectronics
- URL: https://journals.rcsi.science/1064-2269/article/view/198886
- DOI: https://doi.org/10.1134/S1064226917090157
- ID: 198886
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Аннотация
Aluminum nitride films with oblique orientation of the texture axis are produced. Modifications of crystal structure depending on the deposition rate are studied. Two effects of the film growth related to the relation of the deposition rate and surface mobility of substance are analyzed.
Об авторах
V. Luzanov
Kotel’nikov Institute of Radio Engineering and Electronics (Fryazino Branch)
Автор, ответственный за переписку.
Email: valery@luzanov.ru
Россия, Fryazino, Moscow oblast, 141190
