Effect of a DC external electric field on the properties of a nonuniform microwave discharge in hydrogen at reduced pressures
- 作者: Lebedev Y.1, Krashevskaya G.1,2, Tatarinov A.1, Titov A.1, Epshtein I.1
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隶属关系:
- Topchiev Institute of Petrochemical Synthesis
- National Research Nuclear University “MEPhI,”
- 期: 卷 43, 编号 1 (2017)
- 页面: 99-107
- 栏目: Low-Temperature Plasma
- URL: https://journals.rcsi.science/1063-780X/article/view/186411
- DOI: https://doi.org/10.1134/S1063780X1701007X
- ID: 186411
如何引用文章
详细
The effect of a dc external electrical field on the properties of a highly nonuniform electrode microwave discharge in hydrogen at a pressure of 1 Torr was studied using optical emission spectroscopy and selfconsistent two-dimensional simulations. It is shown that the negative voltage applied to the antenna electrode with respect to the grounded chamber increases the discharge radiation intensity, while the positive voltage does not affect the discharge properties. The simulation results agree well with the experimental data.
作者简介
Yu. Lebedev
Topchiev Institute of Petrochemical Synthesis
编辑信件的主要联系方式.
Email: lebedev@ips.ac.ru
俄罗斯联邦, Moscow, 119991
G. Krashevskaya
Topchiev Institute of Petrochemical Synthesis; National Research Nuclear University “MEPhI,”
Email: lebedev@ips.ac.ru
俄罗斯联邦, Moscow, 119991; Moscow, 115409
A. Tatarinov
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
俄罗斯联邦, Moscow, 119991
A. Titov
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
俄罗斯联邦, Moscow, 119991
I. Epshtein
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
俄罗斯联邦, Moscow, 119991