Effect of a DC external electric field on the properties of a nonuniform microwave discharge in hydrogen at reduced pressures
- Authors: Lebedev Y.A.1, Krashevskaya G.V.1,2, Tatarinov A.V.1, Titov A.Y.1, Epshtein I.L.1
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Affiliations:
- Topchiev Institute of Petrochemical Synthesis
- National Research Nuclear University “MEPhI,”
- Issue: Vol 43, No 1 (2017)
- Pages: 99-107
- Section: Low-Temperature Plasma
- URL: https://journals.rcsi.science/1063-780X/article/view/186411
- DOI: https://doi.org/10.1134/S1063780X1701007X
- ID: 186411
Cite item
Abstract
The effect of a dc external electrical field on the properties of a highly nonuniform electrode microwave discharge in hydrogen at a pressure of 1 Torr was studied using optical emission spectroscopy and selfconsistent two-dimensional simulations. It is shown that the negative voltage applied to the antenna electrode with respect to the grounded chamber increases the discharge radiation intensity, while the positive voltage does not affect the discharge properties. The simulation results agree well with the experimental data.
About the authors
Yu. A. Lebedev
Topchiev Institute of Petrochemical Synthesis
Author for correspondence.
Email: lebedev@ips.ac.ru
Russian Federation, Moscow, 119991
G. V. Krashevskaya
Topchiev Institute of Petrochemical Synthesis; National Research Nuclear University “MEPhI,”
Email: lebedev@ips.ac.ru
Russian Federation, Moscow, 119991; Moscow, 115409
A. V. Tatarinov
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
Russian Federation, Moscow, 119991
A. Yu. Titov
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
Russian Federation, Moscow, 119991
I. L. Epshtein
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
Russian Federation, Moscow, 119991