Effect of a DC external electric field on the properties of a nonuniform microwave discharge in hydrogen at reduced pressures
- Авторлар: Lebedev Y.1, Krashevskaya G.1,2, Tatarinov A.1, Titov A.1, Epshtein I.1
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Мекемелер:
- Topchiev Institute of Petrochemical Synthesis
- National Research Nuclear University “MEPhI,”
- Шығарылым: Том 43, № 1 (2017)
- Беттер: 99-107
- Бөлім: Low-Temperature Plasma
- URL: https://journals.rcsi.science/1063-780X/article/view/186411
- DOI: https://doi.org/10.1134/S1063780X1701007X
- ID: 186411
Дәйексөз келтіру
Аннотация
The effect of a dc external electrical field on the properties of a highly nonuniform electrode microwave discharge in hydrogen at a pressure of 1 Torr was studied using optical emission spectroscopy and selfconsistent two-dimensional simulations. It is shown that the negative voltage applied to the antenna electrode with respect to the grounded chamber increases the discharge radiation intensity, while the positive voltage does not affect the discharge properties. The simulation results agree well with the experimental data.
Авторлар туралы
Yu. Lebedev
Topchiev Institute of Petrochemical Synthesis
Хат алмасуға жауапты Автор.
Email: lebedev@ips.ac.ru
Ресей, Moscow, 119991
G. Krashevskaya
Topchiev Institute of Petrochemical Synthesis; National Research Nuclear University “MEPhI,”
Email: lebedev@ips.ac.ru
Ресей, Moscow, 119991; Moscow, 115409
A. Tatarinov
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
Ресей, Moscow, 119991
A. Titov
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
Ресей, Moscow, 119991
I. Epshtein
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
Ресей, Moscow, 119991