Effect of a DC external electric field on the properties of a nonuniform microwave discharge in hydrogen at reduced pressures
- Autores: Lebedev Y.1, Krashevskaya G.1,2, Tatarinov A.1, Titov A.1, Epshtein I.1
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Afiliações:
- Topchiev Institute of Petrochemical Synthesis
- National Research Nuclear University “MEPhI,”
- Edição: Volume 43, Nº 1 (2017)
- Páginas: 99-107
- Seção: Low-Temperature Plasma
- URL: https://journals.rcsi.science/1063-780X/article/view/186411
- DOI: https://doi.org/10.1134/S1063780X1701007X
- ID: 186411
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Resumo
The effect of a dc external electrical field on the properties of a highly nonuniform electrode microwave discharge in hydrogen at a pressure of 1 Torr was studied using optical emission spectroscopy and selfconsistent two-dimensional simulations. It is shown that the negative voltage applied to the antenna electrode with respect to the grounded chamber increases the discharge radiation intensity, while the positive voltage does not affect the discharge properties. The simulation results agree well with the experimental data.
Sobre autores
Yu. Lebedev
Topchiev Institute of Petrochemical Synthesis
Autor responsável pela correspondência
Email: lebedev@ips.ac.ru
Rússia, Moscow, 119991
G. Krashevskaya
Topchiev Institute of Petrochemical Synthesis; National Research Nuclear University “MEPhI,”
Email: lebedev@ips.ac.ru
Rússia, Moscow, 119991; Moscow, 115409
A. Tatarinov
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
Rússia, Moscow, 119991
A. Titov
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
Rússia, Moscow, 119991
I. Epshtein
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
Rússia, Moscow, 119991